InvenSense Patent Grants

Sensor data acquisition system with integrated power management

Granted: April 25, 2017
Patent Number: 9634567
A microelectromechanical systems (MEMS) sensor with an integrated power management system that performs analog to digital conversion of weak signals is provided. The MEMs sensor can include a switching regulator that steps a supply voltage down to a voltage appropriate for an analog to digital converter (A/D converter). A timing circuit is provided to generate a clock frequency for the switching regulator and the A/D converter such that the clock frequencies are harmonically related. The…

MEMS sensor offset compensation with strain gauge

Granted: April 18, 2017
Patent Number: 9625329
An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the…

Systems and methods for optical image stabilization using a digital interface

Granted: April 18, 2017
Patent Number: 9628713
Systems and methods are disclosed for implementing optical image stabilization (OIS) in a mobile device. One or more functions associated with OIS may be performed by hardware and/or processing resources that are provided independently of a camera unit.

Back cavity leakage test for acoustic sensor

Granted: April 18, 2017
Patent Number: 9628929
An acoustic sensor system has an acoustic sensor with a cavity, a cavity leakage, and a cavity pressure. The acoustic sensor system further has a test controller coupled to the acoustic sensor that causes a change in the cavity pressure. A response of the acoustic sensor to the change in the cavity pressure is used to measure the cavity leakage.

MEMS device and process for RF and low resistance applications

Granted: April 11, 2017
Patent Number: 9617141
MEMS device for low resistance applications are disclosed. In a first aspect, the MEMS device comprises a MEMS wafer including a handle wafer with one or more cavities containing a first surface and a second surface and an insulating layer deposited on the second surface of the handle wafer. The MEMS device also includes a device layer having a third and fourth surface, the third surface bonded to the insulating layer of the second surface of handle wafer; and a metal conductive layer on…

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Granted: April 11, 2017
Patent Number: 9617144
An integrated package of at least one environmental sensor and at least one MEMS acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. The port exposes the environmental sensor to an air flow and the acoustic sensor to sound waves. An example of the acoustic sensor is a microphone and an example of the…

Piezoelectric acoustic resonator based sensor

Granted: April 11, 2017
Patent Number: 9618405
A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that…

Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same

Granted: April 11, 2017
Patent Number: 9621975
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a first substrate having a first surface and a second surface, and a port disposed through the first substrate, wherein the port is configured to receive acoustic waves and wherein the first surface is exposed to an environment outside the MEMS device; and a diaphragm coupled to and facing the second surface and configured to deflect in response to pressure differential at the diaphragm in response to…

Film induced interface roughening and method of producing the same

Granted: April 4, 2017
Patent Number: 9611133
Various embodiments provide for a method for roughening a surface of a MEMs device or the surface of a CMOS surface. A first material can be deposited in a thin layer over a surface made of a second material. After heating, the first and second materials, they can partially melt and interdiffuse, forming an alloy. The first material can then be removed and the alloy is removed at the same time. The surface of the second material that is left behind has then been roughened due to the…

MEMS sensor integrated with a flip chip

Granted: April 4, 2017
Patent Number: 9611137
A method and system for providing a MEMS sensor integrated with a flip chip are disclosed. In a first aspect, the system comprises a MEMS sensor, at least one flip chip coupled to the MEMS sensor, and at least one through-silicon via (TSV) that electrically connects the at least one flip chip to the MEMS sensor. In a second aspect, the system comprises a MEMS sensor that includes a CMOS coupled to a MEMS structure, wherein the CMOS comprises a substrate coupled to an interconnect in…

Magnetometer using magnetic materials on accelerometer

Granted: March 28, 2017
Patent Number: 9606191
A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the…

Microphone with programmable frequency response

Granted: March 21, 2017
Patent Number: 9602924
Methods and apparatus automatically cancel or attenuate an unwanted signal (such as low frequencies from wind buffets) from, and/or control frequency response of, a condenser microphone, or control the effective condenser microphone sensitivity before the signal reaches an ASIC or other processing circuit. As a result, the maximum amplitude signal seen by the processing circuit is limited, thereby preventing overloading the input of the processing circuit. Remaining (wanted) frequencies…

MEMS sensor including an over-travel stop and method of manufacture

Granted: March 14, 2017
Patent Number: 9593008
A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third…

Wearable device assisting smart media application and vice versa

Granted: March 14, 2017
Patent Number: 9595181
A system includes a wearable device connected to a user and a smart media in remote communication with the wearable device. The wearable device is operable to track movement of the user and transmit the track movement information to the smart media. The smart media is operable to receive the track movement information and to use the received track movement information in an independent application.

MEMS microphone with spring suspended backplate

Granted: March 14, 2017
Patent Number: 9596547
A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

Systems and methods for pressure sensor calibration

Granted: March 7, 2017
Patent Number: 9588006
Systems and methods are disclosed for calibrating a pressure sensor associated with a mobile device. Location information may be determined for the mobile device and used to obtain reference pressure information. The reference pressure information may then be used to calibrate the pressure sensor. Additionally, when the pressure sensor of the mobile device has been calibrated, output from the pressure sensor may be used as reference pressure information by another device.

Pressure sensor with deformable membrane and method of manufacture

Granted: February 28, 2017
Patent Number: 9581512
A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane…

Pre-molded MEMS device package having conductive column coupled to leadframe and cover

Granted: February 21, 2017
Patent Number: 9573800
A MEMS lead frame package body encloses a MEMS device enclosed in an internal cavity formed by the mold body and cover. To accommodate a MEMS microphone, an acoustic aperture extends through the mold body. In some embodiments, a conductive column extends through the pre-molded body to allow electrical connection from a partially encapsulated lead frame to the conductive cover. Some embodiments may include a multi-tiered cavity within the mold body for mounting an integrated circuit…

Cavity pressure modification using local heating with a laser

Granted: January 31, 2017
Patent Number: 9556019
A method and system for changing a pressure within at least one enclosure in a MEMS device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. In a second aspect, the system comprises a MEMS device that includes a first substrate, a second substrate…

Low power bandgap circuit device with zero temperature coefficient current generation

Granted: January 17, 2017
Patent Number: 9547325
A low power bandgap circuit device that generates temperature independent reference voltages and/or zero temperature coefficient currents is disclosed. The circuit comprises a first pair of transistors, an amplifier, a star connected resistive network, and a second pair of transistors, wherein zero temperature coefficient currents are generated through mirroring and reuse of current from the star connected resistive network.