InvenSense Patent Grants

Microelectromechanical systems sensor control interface

Granted: June 27, 2017
Patent Number: 9689739
Microelectromechanical (MEMS) sensors and control interfaces, control, interface components, protocols, systems, and methods are described. An exemplary control interface can comprise one or more predefined symbols that facilitate control of a MEMS sensor over an existing pin of a package comprising one or more MEMS sensors. Provided implementations described read/write protocols that enable reading and/or writing internal registers associated with MEMS sensors and/or other electronic…

Extension-mode angular velocity sensor

Granted: June 20, 2017
Patent Number: 9683844
An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting…

In-use automatic calibration methodology for sensors in mobile devices

Granted: June 20, 2017
Patent Number: 9683865
A method, system and computer readable medium for calibrating an accelerometer in a portable device is disclosed. The method, system and computer readable medium comprises receiving data from the accelerometer, and providing accelerometer samples from the data based upon one or more selection rules that adaptively selects data that satisfy certain criteria. The method system and computer readable medium also includes fitting the accelerometer samples to a mathematical mode. The method…

MEMS microphone system for harsh environments

Granted: June 13, 2017
Patent Number: 9681242
A MEMS microphone system suited for harsh environments. The system uses an integrated circuit package. A first, solid metal lid covers one face of a ceramic package base that includes a cavity, forming an acoustic chamber. The base includes an aperture through the opposing face of the base for receiving audio signals into the chamber. A MEMS microphone is attached within the chamber about the aperture. A filter covers the aperture opening in the opposing face of the base to prevent…

Multipath digital microphones

Granted: June 6, 2017
Patent Number: 9673768
Multipath digital microphone systems comprising a multipath digital audio combiner component are described. Exemplary multipath digital microphone systems can switch from conveying one digital audio signal to conveying another digital audio signal based on one or more switching criteria determined by an exemplary multipath digital audio combiner component. Provided implementations can be configured to switch from conveying one digital audio signal to conveying digital audio signal…

MEMS device with electrodes permeable to outgassing species

Granted: May 30, 2017
Patent Number: 9663349
A MEMS device and method for providing a MEMS device are disclosed. In a first aspect, the MEMS device comprises a first substrate and a second substrate coupled to the first substrate forming a sealed enclosure. A moveable structure is located within the sealed enclosure. An outgassing layer is formed on the first or second substrates and within the sealed enclosure. A first conductive layer is disposed between the moveable structure and the outgassing layer, wherein the first…

Air sensor with air flow control

Granted: May 30, 2017
Patent Number: 9664660
A system and method for providing and/or controlling air flow to an air sensor. As a non-limiting example, an air sensor system may include mechanical and/or electromechanical features (e.g., MEMS features) to control air flow to an air sensor. Various aspects of the disclosure may, for example, be implemented in a personal electronic device.

In-plane sensing Lorentz force magnetometer

Granted: May 30, 2017
Patent Number: 9664750
A magnetic field sensor includes a driving element through which an electric current circumnavigates the driving element. A Lorentz force acts on the driving element resulting in a torque about a first axis in response to a magnetic field along a second axis substantially parallel to a plane of a substrate. The driving element is coiled-shaped. A sensing element of the magnetic field sensor is configured to rotate about the first axis substantially parallel to the plane of the substrate…

Electrical testing and feedthrough cancellation for an acoustic sensor

Granted: May 23, 2017
Patent Number: 9661433
A method and circuit for testing an acoustic sensor are disclosed. In a first aspect, the method comprises using electro-mechanical features of the acoustic sensor to measure characteristic of the acoustic sensor. In a second aspect, the method comprises utilizing an actuation signal to evaluate mechanical characteristics of the acoustic sensor. In a third aspect, the method comprises using a feedthrough cancellation system to measure a capacitance of the acoustic sensor. In the fourth…

Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof

Granted: May 16, 2017
Patent Number: 9650241
A method for forming a MEMS device includes coupling a MEMS substrate and a base substrate. The MEMS substrate and the base substrate contain at least two enclosures. One enclosures has a first vertical gap between the bonding surface of the MEMS substrate and the bonding surface of the base substrate that is less than a second vertical gap between the bonding surface of the MEMS substrate and the bonding surface of the base substrate than another of the enclosures to provide a height…

Portable navigation system

Granted: May 16, 2017
Patent Number: 9651387
A portable navigation module and its method of operation are disclosed for seamlessly providing navigation and positioning information to a user. The module comprises: means, such as a GPS receiver, for receiving a first set of navigational information from an external source, such as satellites; and an inertial sensor unit for generating a second set of navigational information at the module. The navigational information is used by a processor programmed with a core algorithm, to…

Sensor data acquisition system with integrated power management

Granted: April 25, 2017
Patent Number: 9634567
A microelectromechanical systems (MEMS) sensor with an integrated power management system that performs analog to digital conversion of weak signals is provided. The MEMs sensor can include a switching regulator that steps a supply voltage down to a voltage appropriate for an analog to digital converter (A/D converter). A timing circuit is provided to generate a clock frequency for the switching regulator and the A/D converter such that the clock frequencies are harmonically related. The…

MEMS sensor offset compensation with strain gauge

Granted: April 18, 2017
Patent Number: 9625329
An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the…

Systems and methods for optical image stabilization using a digital interface

Granted: April 18, 2017
Patent Number: 9628713
Systems and methods are disclosed for implementing optical image stabilization (OIS) in a mobile device. One or more functions associated with OIS may be performed by hardware and/or processing resources that are provided independently of a camera unit.

Back cavity leakage test for acoustic sensor

Granted: April 18, 2017
Patent Number: 9628929
An acoustic sensor system has an acoustic sensor with a cavity, a cavity leakage, and a cavity pressure. The acoustic sensor system further has a test controller coupled to the acoustic sensor that causes a change in the cavity pressure. A response of the acoustic sensor to the change in the cavity pressure is used to measure the cavity leakage.

MEMS device and process for RF and low resistance applications

Granted: April 11, 2017
Patent Number: 9617141
MEMS device for low resistance applications are disclosed. In a first aspect, the MEMS device comprises a MEMS wafer including a handle wafer with one or more cavities containing a first surface and a second surface and an insulating layer deposited on the second surface of the handle wafer. The MEMS device also includes a device layer having a third and fourth surface, the third surface bonded to the insulating layer of the second surface of handle wafer; and a metal conductive layer on…

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Granted: April 11, 2017
Patent Number: 9617144
An integrated package of at least one environmental sensor and at least one MEMS acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. The port exposes the environmental sensor to an air flow and the acoustic sensor to sound waves. An example of the acoustic sensor is a microphone and an example of the…

Piezoelectric acoustic resonator based sensor

Granted: April 11, 2017
Patent Number: 9618405
A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that…

Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same

Granted: April 11, 2017
Patent Number: 9621975
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a first substrate having a first surface and a second surface, and a port disposed through the first substrate, wherein the port is configured to receive acoustic waves and wherein the first surface is exposed to an environment outside the MEMS device; and a diaphragm coupled to and facing the second surface and configured to deflect in response to pressure differential at the diaphragm in response to…

Film induced interface roughening and method of producing the same

Granted: April 4, 2017
Patent Number: 9611133
Various embodiments provide for a method for roughening a surface of a MEMs device or the surface of a CMOS surface. A first material can be deposited in a thin layer over a surface made of a second material. After heating, the first and second materials, they can partially melt and interdiffuse, forming an alloy. The first material can then be removed and the alloy is removed at the same time. The surface of the second material that is left behind has then been roughened due to the…