KLA-Tencor Profile

KLA-Tencor Patent Grants

Inspection systems and techniques with enhanced detection

Patent Number 9599573 - March 21, 2017

Disclosed are methods and apparatus for inspecting semiconductor samples. On an inspection tool, a plurality of different wavelength ranges is…

Photocathode including silicon substrate with boron layer

Patent Number 9601299 - March 21, 2017

A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent…

Selecting one or more parameters for inspection of a wafer

Patent Number 9601393 - March 21, 2017

Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are…

Dispersion model for band gap tracking

Patent Number 9595481 - March 14, 2017

Methods and systems for determining band structure characteristics of high-k dielectric films deposited over a substrate based on spectral…

Pick-and-place head and method for picking work-pieces

Patent Number 9586325 - March 7, 2017

A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at…

KLA-Tencor Patent Applications

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

COMPRESSIVE SENSING FOR METROLOGY

Application Number 20170076440 - March 16, 2017

Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A…

TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS

Application Number 20170069080 - March 9, 2017

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown…

MONITORING CHANGES IN PHOTOMASK DEFECTIVITY

Application Number 20170053395 - February 23, 2017

A reticle that is within specifications is inspected to generate baseline candidate defects and their location and size. After using the…

POLYGON-BASED GEOMETRY CLASSIFICATION FOR SEMICONDUCTOR MASK INSPECTION

Application Number 20170046471 - February 16, 2017

Disclosed are methods and apparatus for providing feature classification for inspection of a photolithographic mask. A design database for…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009