KLA-Tencor Profile

KLA-Tencor Patent Grants

Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool

Patent Number 9546862 - January 17, 2017

Systems and methods for improving results of wafer higher order shape (HOS) characterization and wafer classification are disclosed. The…

Metrology target indentification, design and verification

Patent Number 9546946 - January 17, 2017

Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as…

Multi-spot scanning collection optics

Patent Number 9546962 - January 17, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

Film-growth model using level sets

Patent Number 9547233 - January 17, 2017

A technique for determining a set of surface profiles in a multilayer stack during a fabrication process may be determined using a model of…

Apparatus and methods for predicting wafer-level defect printability

Patent Number 9547892 - January 17, 2017

Disclosed are methods and apparatus for qualifying a photolithographic reticle. A reticle inspection tool is used to acquire images at…

KLA-Tencor Patent Applications

Front Quartersphere Scattered Light Analysis

Application Number 20170010222 - January 12, 2017

A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source…

METHODS AND APPARATUS FOR SPECKLE SUPPRESSION IN LASER DARK-FIELD SYSTEMS

Application Number 20170011495 - January 12, 2017

Disclosed are apparatus and methods for detecting defects on a semiconductor sample. The system includes an illumination module for directing…

METHODS AND APPARATUS FOR MEASURING HEIGHT ON A SEMICONDUCTOR WAFER

Application Number 20160377412 - December 29, 2016

Disclosed are apparatus and methods for determining height of a semiconductor structure. The system includes an illumination module for…

MACHINE LEARNING METHOD AND APPARATUS FOR INSPECTING RETICLES

Application Number 20160335753 - November 17, 2016

Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a…

MULTI-MODEL METROLOGY

Application Number 20160322267 - November 3, 2016

Disclosed are apparatus and methods for characterizing a plurality of structures of interest on a semiconductor wafer. A plurality of models…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009