KLA-Tencor Profile

KLA-Tencor Patent Grants

Laser with integrated multi line or scanning beam capability

Patent Number 9678350 - June 13, 2017

A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength;…

Target element types for process parameter metrology

Patent Number 9678421 - June 13, 2017

Metrology targets, target design methods and metrology methods are provided. Metrology targets comprise target elements belonging to two or…

Photoresist simulation

Patent Number 9679116 - June 13, 2017

A processor based method for measuring dimensional properties of a photoresist profile by determining a number acid generators and quenchers…

Apparatus and methods for inspecting extreme ultra violet reticles

Patent Number 9679372 - June 13, 2017

Disclosed are methods and apparatus for inspecting an extreme ultraviolet (EUV) reticle is disclosed. An inspection tool for detecting…

Pick and place device with automatic pick-up-height adjustment and a method and a computer program product to automatically adjust the pick-up-height of a pick and place device

Patent Number 9669550 - June 6, 2017

A pick and place device, a method and a computer program product for automatic pick-up-height adjustment. A first pneumatic system has a first…

KLA-Tencor Patent Applications

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

Application Number 20170176346 - June 22, 2017

Disclosed are methods and apparatus for inspecting semiconductor samples. On an inspection tool, a plurality of different wavelength ranges is…

MULTI-SPOT SCANNING COLLECTION OPTICS

Application Number 20170115232 - April 27, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

COMPRESSIVE SENSING FOR METROLOGY

Application Number 20170076440 - March 16, 2017

Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A…

TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS

Application Number 20170069080 - March 9, 2017

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009