KLA-Tencor Profile

KLA-Tencor Patent Grants

Variable image field curvature for object inspection

Patent Number 9752992 - September 5, 2017

Field curvature of an optical system is modified based on topography of the surface of a wafer such that an image of each of the segments of…

High damage threshold frequency conversion system

Patent Number 9753352 - September 5, 2017

The present invention includes a fundamental laser light source configured to generate fundamental wavelength laser light, a first nonlinear…

Producing resist layers using fine segmentation

Patent Number 9753364 - September 5, 2017

Methods of designing resist layers to enhance production accuracy, as well as respective layers, design files and metrology targets are…

High-speed hotspot or defect imaging with a charged particle beam system

Patent Number 9754761 - September 5, 2017

An inspection tool includes a controller that is configured to generate a scan pattern for an electron beam to image areas of interest on the…

Automatic calibration sample selection for die-to-database photomask inspection

Patent Number 9747518 - August 29, 2017

A method for selecting samples of reticle design data patterns in order to calibrate the parameters based on which the reference image used in…

KLA-Tencor Patent Applications

MACHINE LEARNING METHOD AND APPARATUS FOR INSPECTING RETICLES

Application Number 20170221190 - August 3, 2017

Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a…

SIMULTANEOUS MULTI-SPOT INSPECTION AND IMAGING

Application Number 20170205358 - July 20, 2017

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a…

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

Application Number 20170176346 - June 22, 2017

Disclosed are methods and apparatus for inspecting semiconductor samples. On an inspection tool, a plurality of different wavelength ranges is…

MULTI-SPOT SCANNING COLLECTION OPTICS

Application Number 20170115232 - April 27, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009