KLA-Tencor Profile

KLA-Tencor Patent Grants

Simultaneous multi-spot inspection and imaging

Patent Number 9568435 - February 14, 2017

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a…

Automated image-based process monitoring and control

Patent Number 9569834 - February 14, 2017

Methods and devices are disclosed for automated detection of a status of wafer fabrication process based on images. The methods advantageously…

Particle suspensions used as low-contrast standards for inspection of liquids

Patent Number 9562846 - February 7, 2017

In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological…

Based sampling and binning for yield critical defects

Patent Number 9563943 - February 7, 2017

Methods and systems for design based sampling and binning for yield critical defects are provided. One method includes aligning each image…

Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry

Patent Number 9558545 - January 31, 2017

Systems and methods for predicting and controlling pattern quality data (e.g., critical dimension and/or pattern defectivity) in patterned…

KLA-Tencor Patent Applications

POLYGON-BASED GEOMETRY CLASSIFICATION FOR SEMICONDUCTOR MASK INSPECTION

Application Number 20170046471 - February 16, 2017

Disclosed are methods and apparatus for providing feature classification for inspection of a photolithographic mask. A design database for…

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO LAYERS

Application Number 20170038198 - February 9, 2017

A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or…

Front Quartersphere Scattered Light Analysis

Application Number 20170010222 - January 12, 2017

A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source…

METHODS AND APPARATUS FOR SPECKLE SUPPRESSION IN LASER DARK-FIELD SYSTEMS

Application Number 20170011495 - January 12, 2017

Disclosed are apparatus and methods for detecting defects on a semiconductor sample. The system includes an illumination module for directing…

METHODS AND APPARATUS FOR MEASURING HEIGHT ON A SEMICONDUCTOR WAFER

Application Number 20160377412 - December 29, 2016

Disclosed are apparatus and methods for determining height of a semiconductor structure. The system includes an illumination module for…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009