KLA-Tencor Profile

KLA-Tencor Patent Grants

System and method for semiconductor wafer inspection and metrology

Patent Number 9658150 - May 23, 2017

A system determines a value, such as a thickness, surface roughness, material concentration, and/or critical dimension, of a layer on a wafer…

TDI imaging system with variable voltage readout clock signals

Patent Number 9658170 - May 23, 2017

A Time Delay and Integration (TDI) imaging system utilizing variable voltage readout clock signals having progressively increasing amplitudes…

Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer

Patent Number 9659670 - May 23, 2017

Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are…

Low noise, high stability, deep ultra-violet, continuous wave laser

Patent Number 9660409 - May 23, 2017

A laser for generating deep ultra-violet (DUV) continuous wave (CW) light includes a second-harmonic generator and a fourth-harmonic…

Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

Patent Number 9651943 - May 16, 2017

Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on…

KLA-Tencor Patent Applications

MULTI-SPOT SCANNING COLLECTION OPTICS

Application Number 20170115232 - April 27, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

COMPRESSIVE SENSING FOR METROLOGY

Application Number 20170076440 - March 16, 2017

Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A…

TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS

Application Number 20170069080 - March 9, 2017

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown…

MONITORING CHANGES IN PHOTOMASK DEFECTIVITY

Application Number 20170053395 - February 23, 2017

A reticle that is within specifications is inspected to generate baseline candidate defects and their location and size. After using the…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009