KLA-Tencor Profile

KLA-Tencor Patent Grants

Hybrid phase unwrapping systems and methods for patterned wafer measurement

Patent Number 9632038 - April 25, 2017

Systems and methods for unwrapping phase signals obtained from interferometry measurements of patterned wafer surfaces are disclosed. A phase…

Lens array-based illumination for wafer inspection

Patent Number 9625726 - April 18, 2017

Systems configured to provide illumination for wafer inspection performed by a wafer inspection tool are provided. One system includes one or…

Source multiplexing illumination for mask inspection

Patent Number 9625810 - April 18, 2017

Methods and systems for source multiplexing illumination for mask inspection are disclosed. Such illumination systems enable EUV sources of…

Calculation method for local film stress measurements using local film thickness values

Patent Number 9625823 - April 18, 2017

A system and method for local film stress calculation is disclosed. The method may include specifying a plurality of measurement points on a…

Computation efficiency by diffraction order truncation

Patent Number 9625937 - April 18, 2017

A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set…

KLA-Tencor Patent Applications

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

COMPRESSIVE SENSING FOR METROLOGY

Application Number 20170076440 - March 16, 2017

Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A…

TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS

Application Number 20170069080 - March 9, 2017

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown…

MONITORING CHANGES IN PHOTOMASK DEFECTIVITY

Application Number 20170053395 - February 23, 2017

A reticle that is within specifications is inspected to generate baseline candidate defects and their location and size. After using the…

POLYGON-BASED GEOMETRY CLASSIFICATION FOR SEMICONDUCTOR MASK INSPECTION

Application Number 20170046471 - February 16, 2017

Disclosed are methods and apparatus for providing feature classification for inspection of a photolithographic mask. A design database for…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009