KLA-Tencor Profile

KLA-Tencor Patent Grants

Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry

Patent Number 9709386 - July 18, 2017

Disclosed are methods and apparatus for measuring a characteristics of a through-silicon via (TSV) structure. A beam profile reflectivity…

Determining a configuration for an optical element positioned in a collection aperture during wafer inspection

Patent Number 9709510 - July 18, 2017

Methods and systems for determining a configuration for an optical element positioned in a collection aperture during wafer inspection are…

System and method for separation of pump light and collected light in a laser pumped light source

Patent Number 9709811 - July 18, 2017

A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination…

Overlay target geometry for measuring multiple pitches

Patent Number 9709903 - July 18, 2017

An overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including…

Image based signal response metrology

Patent Number 9710728 - July 18, 2017

Methods and systems for measuring overlay error between structures formed on a substrate by successive lithographic processes are presented…

KLA-Tencor Patent Applications

SIMULTANEOUS MULTI-SPOT INSPECTION AND IMAGING

Application Number 20170205358 - July 20, 2017

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a…

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

Application Number 20170176346 - June 22, 2017

Disclosed are methods and apparatus for inspecting semiconductor samples. On an inspection tool, a plurality of different wavelength ranges is…

MULTI-SPOT SCANNING COLLECTION OPTICS

Application Number 20170115232 - April 27, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

COMPRESSIVE SENSING FOR METROLOGY

Application Number 20170076440 - March 16, 2017

Disclosed are apparatus and methods for determining a structure or process parameter value of a target of interest on a semiconductor wafer. A…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009