KLA-Tencor Profile

KLA-Tencor Patent Grants

Model for accurate photoresist profile prediction

Patent Number 9733576 - August 15, 2017

A photoresist modelling system includes a mathematical model for a photolithography process. The mathematical model may be executable using a…

Method and apparatus for database-assisted requalification reticle inspection

Patent Number 9733640 - August 15, 2017

A method embodiment includes providing a reticle design data that specify a plurality of printable features that are formed on the wafer using…

System and method for enhanced defect detection with a digital matched filter

Patent Number 9734422 - August 15, 2017

Enhanced defect detection of a sample includes acquiring two or more inspection images from a sample from two or more locations of the sample…

Automated inline inspection and metrology using shadow-gram images

Patent Number 9734568 - August 15, 2017

Shadow-grams are used for edge inspection and metrology of a stacked wafer. The system includes a light source that directs collimated light…

Method and system for adaptively scanning a sample during electron beam inspection

Patent Number 9734987 - August 15, 2017

A system for adaptive electron beam scanning may include an inspection sub-system configured to scan an electron beam across the surface of a…

KLA-Tencor Patent Applications

MACHINE LEARNING METHOD AND APPARATUS FOR INSPECTING RETICLES

Application Number 20170221190 - August 3, 2017

Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a…

SIMULTANEOUS MULTI-SPOT INSPECTION AND IMAGING

Application Number 20170205358 - July 20, 2017

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a…

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

Application Number 20170176346 - June 22, 2017

Disclosed are methods and apparatus for inspecting semiconductor samples. On an inspection tool, a plurality of different wavelength ranges is…

MULTI-SPOT SCANNING COLLECTION OPTICS

Application Number 20170115232 - April 27, 2017

Disclosed are apparatus and methods for inspecting or measuring a specimen. A system comprises an illumination channel for generating and…

METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE

Application Number 20170074810 - March 16, 2017

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009