Lam Research Profile

Lam Research Patent Grants

Dielectric window cleaning apparatuses

Patent Number 9623449 - April 18, 2017

A dielectric window cleaning apparatus may be used for cleaning a dielectric window of a plasma processing device. The dielectric window…

Method for RF compensation in plasma assisted atomic layer deposition

Patent Number 9624578 - April 18, 2017

Methods for depositing film on substrates are provided. In these embodiments, the substrates are processed in batches. Due to changing…

Tuning a parameter associated with plasma impedance

Patent Number 9627182 - April 18, 2017

Systems and methods for tuning a parameter associated with plasma impedance are described. One of the methods includes receiving information…

System, method and apparatus for using optical data to monitor RF generator operations

Patent Number 9627186 - April 18, 2017

A system and method monitoring a plasma with an optical sensor to determine the operations of a pulsed RF signal for plasma processing…

Dielectric repair for emerging memory devices

Patent Number 9627608 - April 18, 2017

Systems and method include providing a non-volatile random access memory (NVRAM) stack including a plurality of layers. The plurality of…

Lam Research Patent Applications

Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings

Application Number 20170040147 - February 9, 2017

In one embodiment, a plasma etching system may include a process gas source, a plasma processing chamber, and a gas supply conduit. A plasma…

DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY

Application Number 20160340781 - November 24, 2016

A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed.…

INTERFACE PASSIVATION LAYERS AND METHODS OF FABRICATING

Application Number 20160343806 - November 24, 2016

Methods for fabricating interface passivation layers in a circuit structure are provided. The method includes forming a silicon-germanium…

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING

Application Number 20160333475 - November 17, 2016

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF

Application Number 20160336213 - November 17, 2016

A semiconductor substrate processing apparatus comprises a vacuum chamber in which a semiconductor substrate may be processed, a showerhead…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…