Lam Research Profile

Lam Research Patent Grants

Dense oxide coated component of a plasma processing chamber and method of manufacture thereof

Patent Number 9546432 - January 17, 2017

A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of…

Methods and apparatus for dual confinement and ultra-high pressure in an adjustable gap plasma chamber

Patent Number 9548186 - January 17, 2017

A plasma processing system having a plasma processing chamber configured for processing a substrate is provided. The plasma processing system…

Method of conditioning vacuum chamber of semiconductor substrate processing apparatus

Patent Number 9548188 - January 17, 2017

A method of conditioning a vacuum chamber of a semiconductor substrate processing apparatus includes forming a layer of an organic polymeric…

Method and apparatus for processing wafer-shaped articles

Patent Number 9548221 - January 17, 2017

The wet treatment of wafer-shaped articles is improved by utilizing a droplet generator designed to produce a spray of monodisperse droplets.…

Apparatus for treating surfaces of wafer-shaped articles

Patent Number 9548223 - January 17, 2017

A device and method for processing wafer-shaped articles comprises a process chamber and a rotary chuck located within the process chamber.…

Lam Research Patent Applications

DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY

Application Number 20160340781 - November 24, 2016

A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed.…

INTERFACE PASSIVATION LAYERS AND METHODS OF FABRICATING

Application Number 20160343806 - November 24, 2016

Methods for fabricating interface passivation layers in a circuit structure are provided. The method includes forming a silicon-germanium…

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING

Application Number 20160333475 - November 17, 2016

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF

Application Number 20160336213 - November 17, 2016

A semiconductor substrate processing apparatus comprises a vacuum chamber in which a semiconductor substrate may be processed, a showerhead…

SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

Application Number 20160300741 - October 13, 2016

A substrate support in a semiconductor plasma processing apparatus, comprises multiple independently controllable thermal zones arranged in a…

Lam Research Federal Litigation Filings

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…