Lam Research Profile

Lam Research Patent Grants

Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator

Patent Number 9711332 - July 18, 2017

Systems and methods for tuning an impedance matching network in a step-wise fashion for each state are described. By tuning the impedance…

Shadow trim line edge roughness reduction

Patent Number 9711359 - July 18, 2017

A method for etching an etch layer in a stack over a substrate wherein the etch layer is under a mask layer which is under a patterned organic…

System and method for monitoring temperatures of and controlling multiplexed heater array

Patent Number 9713200 - July 18, 2017

A system for measuring temperatures of and controlling a multi-zone heating plate in a substrate support assembly used to support a…

System for instantaneous radiofrequency power measurement and associated methods

Patent Number 9704692 - July 11, 2017

Each of multiple plasma processing chambers has an RF power input line connected to receive RF power from a common RF power source. An RF…

Corrosion sensor retainer assembly apparatus and method for detecting corrosion

Patent Number 9704761 - July 11, 2017

A corrosion sensor retainer assembly and method for predicting and detecting corrosion within a gas delivery system of a semiconductor…

Lam Research Patent Applications

ACTUATOR TO DYNAMICALLY ADJUST SHOWERHEAD TILT IN A SEMICONDUCTOR PROCESSING APPARATUS

Application Number 20170191160 - July 6, 2017

A showerhead module adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing…

VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION

Application Number 20170178898 - June 22, 2017

A process tuning kit for use in a chemical deposition apparatus wherein the process tuning kit includes a carrier ring, horseshoes and shims.…

SELF LIMITING LATERAL ATOMIC LAYER ETCH

Application Number 20170178917 - June 22, 2017

Methods of and apparatuses for laterally etching semiconductor substrates using an atomic layer etch process involving exposing an oxidized…

SHOWERHEAD ASSEMBLY

Application Number 20170167024 - June 15, 2017

A face plate of a showerhead assembly of a deposition apparatus in which semiconductor substrates are processed includes gas holes arranged in…

MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT

Application Number 20170167790 - June 15, 2017

A semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber includes a multi-plane heater such…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…