Lam Research Profile

Lam Research Patent Grants

Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

Patent Number 9576811 - February 21, 2017

Methods are provided for integrating atomic layer etch and atomic layer deposition by performing both processes in the same chamber or…

Robot for a substrate processing system

Patent Number 9576833 - February 21, 2017

A robot for a substrate processing system includes a first arm and a second arm each including a first arm portion connected to a base, a…

Apparatus and method for dynamic control of plated uniformity with the use of remote electric current

Patent Number 9567685 - February 14, 2017

An apparatus for electroplating metal on a substrate while controlling plating uniformity includes in one aspect: a plating chamber having…

Method and apparatus to minimize seam effect during TEOS oxide film deposition

Patent Number 9570289 - February 14, 2017

A method of minimizing a seam effect of a deposited TEOS oxide film during a trench filling process performed on a semiconductor substrate in…

Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications

Patent Number 9570290 - February 14, 2017

The embodiments herein relate to methods and apparatus for depositing an encapsulation layer over memory stacks in MRAM and PCRAM…

Lam Research Patent Applications

Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings

Application Number 20170040147 - February 9, 2017

In one embodiment, a plasma etching system may include a process gas source, a plasma processing chamber, and a gas supply conduit. A plasma…

DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY

Application Number 20160340781 - November 24, 2016

A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed.…

INTERFACE PASSIVATION LAYERS AND METHODS OF FABRICATING

Application Number 20160343806 - November 24, 2016

Methods for fabricating interface passivation layers in a circuit structure are provided. The method includes forming a silicon-germanium…

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING

Application Number 20160333475 - November 17, 2016

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF

Application Number 20160336213 - November 17, 2016

A semiconductor substrate processing apparatus comprises a vacuum chamber in which a semiconductor substrate may be processed, a showerhead…

Lam Research Federal Litigation Filings

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…