Lam Research Profile

Lam Research Patent Grants

Methods and apparatuses for electroplating nickel using sulfur-free nickel anodes

Patent Number 9732434 - August 15, 2017

Disclosed herein are systems and methods for electroplating nickel which employ substantially sulfur-free nickel anodes. The methods may…

System, method and apparatus for plasma etch having independent control of ion generation and dissociation of process gas

Patent Number 9735020 - August 15, 2017

A method of etching a wafer includes injecting a source gas mixture into a process chamber. The injecting includes injecting the source gas…

Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing

Patent Number 9735035 - August 15, 2017

Disclosed are methods of preparing a semiconductor substrate having a metal seed layer for a subsequent electroplating operation. In some…

Method and apparatus for determining process rate

Patent Number 9735069 - August 15, 2017

A method for dry processing a substrate in a processing chamber is provided. The substrate is placed in the processing chamber. The substrate…

Method, apparatus, and system for establishing a virtual tether between a mobile device and a semiconductor processing tool

Patent Number 9736135 - August 15, 2017

A method for establishing a virtual tether between a mobile device and a semiconductor processing tool, the method including: obtaining, by a…

Lam Research Patent Applications

ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE REACTOR

Application Number 20170213747 - July 27, 2017

The disclosed techniques relate to methods and apparatus for etching a substrate. A plate assembly divides a reaction chamber into a lower and…

ACTUATOR TO DYNAMICALLY ADJUST SHOWERHEAD TILT IN A SEMICONDUCTOR PROCESSING APPARATUS

Application Number 20170191160 - July 6, 2017

A showerhead module adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing…

VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION

Application Number 20170178898 - June 22, 2017

A process tuning kit for use in a chemical deposition apparatus wherein the process tuning kit includes a carrier ring, horseshoes and shims.…

SELF LIMITING LATERAL ATOMIC LAYER ETCH

Application Number 20170178917 - June 22, 2017

Methods of and apparatuses for laterally etching semiconductor substrates using an atomic layer etch process involving exposing an oxidized…

SHOWERHEAD ASSEMBLY

Application Number 20170167024 - June 15, 2017

A face plate of a showerhead assembly of a deposition apparatus in which semiconductor substrates are processed includes gas holes arranged in…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…