Lam Research Profile

Lam Research Patent Grants

Methods for depositing silicon oxide

Patent Number 9685320 - June 20, 2017

The embodiments herein focus on plasma enhanced atomic layer deposition (PEALD) processes. Conventional PEALD techniques result in films…

Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus

Patent Number 9685358 - June 20, 2017

An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements.…

Membrane design for reducing defects in electroplating systems

Patent Number 9677190 - June 13, 2017

Certain embodiments disclosed herein pertain to methods and apparatus for electrodepositing material on a substrate. More particularly, a…

Gas distribution device with actively cooled grid

Patent Number 9679749 - June 13, 2017

A grid assembly for a substrate processing system includes a first portion including a first body defining a central opening, an inlet, an…

Chamber filler kit for plasma etch chamber useful for fast gas switching

Patent Number 9679751 - June 13, 2017

A chamber filler kit for an inductively coupled plasma processing chamber in which semiconductor substrates are processed by inductively…

Lam Research Patent Applications

VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION

Application Number 20170178898 - June 22, 2017

A process tuning kit for use in a chemical deposition apparatus wherein the process tuning kit includes a carrier ring, horseshoes and shims.…

SELF LIMITING LATERAL ATOMIC LAYER ETCH

Application Number 20170178917 - June 22, 2017

Methods of and apparatuses for laterally etching semiconductor substrates using an atomic layer etch process involving exposing an oxidized…

SHOWERHEAD ASSEMBLY

Application Number 20170167024 - June 15, 2017

A face plate of a showerhead assembly of a deposition apparatus in which semiconductor substrates are processed includes gas holes arranged in…

MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT

Application Number 20170167790 - June 15, 2017

A semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber includes a multi-plane heater such…

Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings

Application Number 20170040147 - February 9, 2017

In one embodiment, a plasma etching system may include a process gas source, a plasma processing chamber, and a gas supply conduit. A plasma…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…