Lam Research Profile

Lam Research Patent Grants

Apparatus for treating surfaces of wafer-shaped articles

Patent Number 9657397 - May 23, 2017

An apparatus for processing wafer-shaped articles comprises a closed process chamber providing a gas-tight enclosure. A rotary chuck is…

Measuring and controlling wafer potential in pulsed RF bias processing

Patent Number 9659757 - May 23, 2017

Apparatus and methods are provided for monitoring a pulsed RF bias signal applied to a chuck in a processing chamber. One method includes…

High aspect ratio etch with combination mask

Patent Number 9659783 - May 23, 2017

A method for etching features in a stack is provided. A combination hardmask is formed by forming a first hardmask layer comprising carbon or…

System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path

Patent Number 9652567 - May 16, 2017

Systems and methods for determining an RF transmission line model for an RF transmission system includes generating a baseline RF transmission…

Method and apparatus for surface treatment using inorganic acid and ozone

Patent Number 9653328 - May 16, 2017

An apparatus for treating a surface of an article includes a chamber for receiving an article to be treated. A dispenser dispenses a treatment…

Lam Research Patent Applications

Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings

Application Number 20170040147 - February 9, 2017

In one embodiment, a plasma etching system may include a process gas source, a plasma processing chamber, and a gas supply conduit. A plasma…

DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY

Application Number 20160340781 - November 24, 2016

A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed.…

INTERFACE PASSIVATION LAYERS AND METHODS OF FABRICATING

Application Number 20160343806 - November 24, 2016

Methods for fabricating interface passivation layers in a circuit structure are provided. The method includes forming a silicon-germanium…

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING

Application Number 20160333475 - November 17, 2016

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF

Application Number 20160336213 - November 17, 2016

A semiconductor substrate processing apparatus comprises a vacuum chamber in which a semiconductor substrate may be processed, a showerhead…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…