Interferometric characterization of surface topography
Patent Number 10488184 - November 26, 2019
An interferometric metrology device characterizes a surface topography of a sample at different length scales by combining the interferometric…
Local purge within metrology and inspection systems
Patent Number 10451542 - October 22, 2019
A purge system includes a purge gas distribution manifold that includes at least one port through which light beam from an optical metrology…
Correction of angular error of plane-of-incidence azimuth of optical metrology device
Patent Number 10296554 - May 21, 2019
Optical metrology is used to calibrate the plane-of-incidence (POI) azimuth error by determining and correcting an azimuth angle offset. The…
Scanning white-light interferometry system for characterization of patterned semiconductor features
Patent Number 10288408 - May 14, 2019
A white light interferometric metrology device operates in the image plane and objective pupil plane. The interferometric metrology device…
Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device
Patent Number 10274367 - April 30, 2019
The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a…
FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL
Application Number 20150168290 - June 18, 2015
An optical metrology device, such as an ellipsometer, includes a focusing system that adjusts the focal position of the metrology device in…
OPTICAL METROLOGY WITH MULTIPLE ANGLES OF INCIDENCE AND/OR AZUMITH ANGLES
Application Number 20150153165 - June 4, 2015
An optical metrology device simultaneously detects light with multiple angles of incidence (AOI) and/or multiple azimuth angles to determine…
OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
Application Number 20150146193 - May 28, 2015
An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and…
ELLIPSOMETER FOCUSING SYSTEM
Application Number 20140098369 - April 10, 2014
An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam…
DARK FIELD DIFFRACTION BASED OVERLAY
Application Number 20130278942 - October 24, 2013
A dark field diffraction based overlay metrology device illuminates an overlay target that has at least three pads for an axis, the three pads…
Bryden-Moore v. Nanometrics Inc. et al
California Northern District Court - September 6, 2019
Optical Solutions Incorporated v. Nanometrics Incorporated
California Northern District Court - June 1, 2018
Nanometrics, Incorporated v. Optical Solutions, Inc.
California Northern District Court - January 19, 2018
Optical Solutions,Inc. v. Nanometrics, Inc.
New Hampshire District Court - September 18, 2017
Nanometrics, Inc. v. Faccini
California Northern District Court - June 20, 2017
Nanometrics, Incorporated v. Optical Solutions, Inc.
California Northern District Court - March 5, 2019
ORDER GRANTING 43 MOTION TO DISMISS WITH LEAVE TO AMEND. Amended Complaint by OSI due 4/1/2019. Signed by Judge Beth Labson Freeman on…
Nanometrics Incorporated v. Nova Measuring Instruments Ltd. et al
California Northern District Court - October 24, 2006
SUPPLEMENTAL ORDER TO ORDER SETTING INITIAL CASE MANAGEMENT CONFERENCE re 7 Clerks Notice. Signed by Judge William Alsup on 4/18/06. (dt,…
Nanometrics, Incorporated v. Optical Solutions, Inc.
California California Northern District Court - October 30, 2023
ORDER GRANTING IN PART AND DENYING IN PART 162 163 164 165 166 NANOMETRICS, INC.'S MOTIONS IN LIMINE NOS. 1-5. Signed by Judge Beth…
Nanometrics, Incorporated v. Optical Solutions, Inc.
California California Northern District Court - August 3, 2023
ORDER DENYING 139 MOTION FOR SUMMARY JUDGMENT. Signed by Judge Beth Labson Freeman on 8/3/2023. (mdllc, COURT STAFF) (Filed on 8/3/2023)
Nanometrics, Incorporated v. Optical Solutions, Inc.
California California Northern District Court - June 21, 2023
ORDER GRANTING IN PART AND DENYING IN PART 138 , 140 , AND 142 ADMINISTRATIVE MOTIONS TO FILE UNDER SEAL EXHIBITS TO DEFENDANT NANOMETRICS,…
