Novellus Systems Profile

Novellus Systems Patent Grants

Cross flow manifold for electroplating apparatus

Patent Number 9624592 - April 18, 2017

The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material…

Plasma activated conformal dielectric film deposition

Patent Number 9611544 - April 4, 2017

Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of…

Photoresist strip processes for improved device integrity

Patent Number 9613825 - April 4, 2017

Provided herein are methods and apparatus of hydrogen-based photoresist strip operations that reduce dislocations in a silicon wafer or other…

Methods and apparatus for wetting pretreatment for through resist metal plating

Patent Number 9613833 - April 4, 2017

Disclosed are pre-wetting apparatus designs and methods for cleaning solid contaminants from substrates prior to through resist deposition of…

Contoured showerhead for improved plasma shaping and control

Patent Number 9598770 - March 21, 2017

Semiconductor processing chamber showerheads with contoured faceplates, as well as techniques for producing such faceplates, are provided.…

Novellus Systems Patent Applications

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

Application Number 20140238608 - August 28, 2014

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)