Novellus Systems Profile

Novellus Systems Patent Grants

Apparatus and method for edge bevel removal of copper from silicon wafers

Patent Number 9685353 - June 20, 2017

Chemical etching methods and associated modules for performing the removal of metal from the edge bevel region of a semiconductor wafer are…

Multi-plenum, dual-temperature showerhead

Patent Number 9677176 - June 13, 2017

A dual-temperature, multi-plenum showerhead for use in semiconductor processing equipment is described. The showerhead may supply multiple…

Electrofill vacuum plating cell

Patent Number 9677188 - June 13, 2017

The disclosed embodiments relate to methods and apparatus for immersing a substrate in electrolyte in an electroplating cell under…

Method for depositing a chlorine-free conformal SiN film

Patent Number 9670579 - June 6, 2017

Described are methods of making silicon nitride (SiN) materials on substrates. Improved SiN films made by the methods are also included. One…

Low temperature tungsten film deposition for small critical dimension contacts and interconnects

Patent Number 9673146 - June 6, 2017

Provided are methods of void-free tungsten fill of high aspect ratio features. According to various embodiments, the methods involve a reduced…

Novellus Systems Patent Applications

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

Application Number 20140238608 - August 28, 2014

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)