Novellus Systems Profile

Novellus Systems Patent Grants

Contoured showerhead for improved plasma shaping and control

Patent Number 9598770 - March 21, 2017

Semiconductor processing chamber showerheads with contoured faceplates, as well as techniques for producing such faceplates, are provided.…

Through silicon via filling using an electrolyte with a dual state inhibitor

Patent Number 9593426 - March 14, 2017

A method for electrofilling large, high aspect ratio recessed features with copper without depositing substantial amounts of copper in the…

Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath

Patent Number 9587322 - March 7, 2017

Methods described herein manage wafer entry into an electrolyte so that air entrapment due to initial impact of the wafer and/or wafer holder…

Method for forming tungsten film having low resistivity, low roughness and high reflectivity

Patent Number 9589835 - March 7, 2017

Top-down methods of increasing reflectivity of tungsten films to form films having high reflectivity, low resistivity and low roughness are…

Plasma generator systems and methods of forming plasma

Patent Number 9591738 - March 7, 2017

Systems and methods of forming plasma are provided. In an embodiment, a plasma generator system is provided including a container, a single…

Novellus Systems Patent Applications

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

Application Number 20140238608 - August 28, 2014

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)