Novellus Systems Profile

Novellus Systems Patent Grants

Plasma activated conformal dielectric film deposition

Patent Number 9570274 - February 14, 2017

Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of…

Ultra low silicon loss high dose implant strip

Patent Number 9564344 - February 7, 2017

Improved methods for stripping photoresist and removing ion implant related residues from a work piece surface are provided. According to…

Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants

Patent Number 9552982 - January 24, 2017

Disclosed herein are methods of forming SiC/SiCN film layers on surfaces of semiconductor substrates. The methods may include introducing a…

Protecting anodes from passivation in alloy plating systems

Patent Number 9534308 - January 3, 2017

An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials…

Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating

Patent Number 9523155 - December 20, 2016

The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material…

Novellus Systems Patent Applications

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

Application Number 20140238608 - August 28, 2014

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)