Ultra Clean Patent Grants

Towel presenting and washing machine and a method for operating same

Granted: October 19, 2010
Patent Number: 7814595
There is provided a towel presenting, washing and drying machine, including first and second spaced-apart rollers each rotatable in a clock-wise and counter-clockwise sense; a bath having liquid inlet and outlet ports located between the rollers supporting a plurality of rod members for guiding a towel section in a meandering fashion in the bath; means for cleaning the towel section in the bath; at least one drying drum disposed outside the bath between the rollers, at least one motor…

Gas-panel assembly

Granted: January 22, 2008
Patent Number: 7320339
Modular components for use in a gas-panel assembly of the type having two or more gas-panel sticks mounted on a support, stick being composed of a manifold having a plurality of gas components mounted thereon, and internal fluid connections between individual components carried on each manifolds, are disclosed. The components include one or more modular blocks that can be removably placed within or adjacent an end of each manifold, an internal pipe module that provides an internal fluid…

Gas-panel assembly

Granted: November 27, 2007
Patent Number: 7299825
A gas-panel manifold for use in a gas-panel assembly mounted on a support is disclosed. The manifold includes (i) a plurality of two-port stations at which gas components, including one or more gas-valve components, can be mounted, (II) at least one station having a port for accommodating an overhead fluid connection, and (iii) internal fluid connections between individual stations in the manifold, for carrying a gas from one gas component mounted on the assembly to another, and for…

Gas-panel assembly

Granted: May 8, 2007
Patent Number: 7213618
A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways are disclosed. The manifold includes a plurality of pipe modules which form the fluid-flow pathways and a plurality of block modules which can be placed together in various configurations with the pipe modules to form the fluid manifold. The pipe modules have terminal collars or flanges by which they are supported within the block modules, and the block module…

Gas-panel assembly

Granted: May 23, 2006
Patent Number: 7048008
A fluid manifold and components for constructing the fluid manifold having a plurality of separate fluid-flow pathways. The manifold comprises a plurality of pipe modules which form said fluid-flow pathways and a plurality of block modules which can be joined together in various configurations with the pipe modules to form the fluid manifold. The pipe modules each include an elongate pipe section and two or more connectors, each having a proximal end section joined in fluid communication…

System for cleaning gun barrels

Granted: December 30, 2003
Patent Number: 6668480
A system for cleaning the barrel of a gun which includes a compressible foam projectile, a source of compressed gas, and a flexible connector, such as a hose, for connecting the projectile with the cylinder is disclosed. The projectile resides within a nozzle which is secured to the hose. The cylinder is secured to one end of the hose. In order to clean the gun, the nozzle with the projectile inserted therein is placed within the barrel of the gun. The nozzle forms an airtight seal with…

Resist film removal apparatus and resist film removal method

Granted: August 26, 2003
Patent Number: 6610168
A line slit nozzle for spraying steam is disposed along a diameter of a resist film. Steam containing a mist is sprayed onto a surface of the resist film. The film is thereby peeled off and removed. By using a change in physical properties (swelling, etc.) of the resist film by water, the film is easily and surely peeled off. Breakaway from much resources/energy consumption type techniques is realized. In other words, realized are environment-symbiosis type techniques by which resist…

Welding apparatus for forming chromium oxide passivated film at welded portion

Granted: February 11, 2003
Patent Number: 6518534
An improved method for welding and passivation forms a chromium oxide passivated film over the welded portion during the welding process. In a shielding step, a backshield gas, preferably argon, is flowed around the welding site. In a welding step, an arc gas, preferably argon with approximately 10% hydrogen and less than 1 ppm moisture content, is flowed through the welding head and a welded joint is formed, for example by high speed tungsten-inert gas (TIG) orbital welding. In the…

Method and apparatus for washing and drying semi-conductor devices

Granted: June 26, 2001
Patent Number: 6250318
A cleaning apparatus which comprises a spray cleaning arrangement capable of even cleaning of devices. The cleaning arrangement is disposed within a housing, and is directed towards a conveyor belt, which transports the device to be cleaned across the various wash, rinse and drying zones of the apparatus. At least one spray wand is provided for the circulation of a wash fluid having at least one row of holes disposed longitudinally thereacross for releasing the wash fluid onto the device…

Welding method for forming chromium oxide passivated film at welded portion

Granted: January 9, 2001
Patent Number: 6172320
An improved method for welding and passivation forms a chromium oxide passivated film over the welded portion during the welding process. In a shielding step, a backshield gas, preferably argon, is flowed around the welding site. In a welding step, an arc gas, preferably argon with approximately 10% hydrogen and less than 1 ppm moisture content, is flowed through the welding head and a welded joint is formed, for example by high speed tungsten-inert gas (TIG) orbital welding. In the…

Method and apparatus for removing leaking gas in an integrated gas panel system

Granted: November 7, 2000
Patent Number: 6142164
One aspect of the present invention provides an apparatus which permits the efficient purging of leaked process gas at the component-panel interface in an integrated gas panel system. The apparatus provides conduit structure for directing a flow of purging gas through a surface interface whereat a gas-manifold panel meets gas-manifold components. A further aspect of the invention provides a method for efficiently purging process gas which might leak out at the component-panel interface…

Automated tube cutting apparatus and method

Granted: August 29, 2000
Patent Number: 6112132
A data-driven electrochemical grinding apparatus and method produces series of finished-cut, burr-free tube sections of precisely defined lengths. The data-driven process automatically inputs desired tube lengths, tracks the cut tube sections during the process, and produces recorded output of tube and process parameters. Such tube sections are particularly suitable for use in ultrahigh purity gas cabinets used in semiconductor manufacturing equipment.