Ultratech Profile

Ultratech Patent Grants

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation

Patent Number 9711361 - July 18, 2017

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation are disclosed. The system includes a…

Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations

Patent Number 9691613 - June 27, 2017

Method and devices are disclosed for device manufacture of gallium nitride devices by growing a gallium nitride layer on a silicon substrate…

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

Patent Number 9666432 - May 30, 2017

Atomic Layer Deposition (ALD) is used for heteroepitaxial film growth at reaction temperatures ranging from 80-400° C. The substrate and film…

High-efficiency line-forming optical systems and methods

Patent Number 9638922 - May 2, 2017

A line-forming optical system and method are disclosed that form a line image with high-efficiency. A method includes forming a laser beam…

Masking methods for ALD processes for electrode-based devices

Patent Number 9633850 - April 25, 2017

Masking methods for atomic-layer-deposition processes for electrode-based devices are disclosed, wherein solder is used as a masking material.…

Ultratech Patent Applications

IMPROVED THROUGH SILICON VIA

Application Number 20170194204 - July 6, 2017

Through via holes are prepared for metallization using ALD and PEALD processing. Each via is coated with a titanium nitride barrier layer…

Full-wafer inspection methods having selectable pixel density

Application Number 20170178980 - June 22, 2017

Full-wafer inspection methods for a semiconductor wafer are disclosed. One method includes making a measurement of a select measurement…

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation

Application Number 20170162392 - June 8, 2017

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation are disclosed. The system includes a…

Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry

Application Number 20170162456 - June 8, 2017

Systems and methods of characterizing wafer shape using coherent gradient sensing (CGS) interferometry are disclosed. The method includes…

VAPOR DELIVERY SYSTEM

Application Number 20170145564 - May 25, 2017

An improved ALD system usable for low vapor pressure liquid and sold precursors. The ALD system includes a precursor container and inert gas…

Ultratech Federal Litigation Filings

De Letter et al v. Ultratech, Inc. et al

California Northern District Court - March 22, 2017

The Vladimir Gusinksky Rev. Trust v. Ultratech, Inc. et al

California Northern District Court - March 17, 2017

Ultratech, Inc.

California Northern District Court - May 3, 2016

ALPHA MECHANICAL SERVICE, INC. v. ULTRATECH RACE DEVELOPMENT, INC, ET AL.

North Carolina Middle District Court - January 9, 2015

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al There are opinions or orders for this case

California Northern District Court - December 5, 2014

Ultratech Federal District Court Decisions

De Letter et al v. Ultratech, Inc. et al

California Northern District Court - May 18, 2017

SUA SPONTE JUDICIAL REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP OF CASES Signed by Judge Alsup on 5/18/2017. (whalc1, COURT STAFF)…

Vladimir Gusinksky Rev. Trust v. Ultratech, Inc. et al

California Northern District Court - May 18, 2017

SUA SPONTE JUDICIAL REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP OF CASES re 3:17-cv-01542 Signed by Judge Alsup on 5/18/17. (whalc1,…

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - October 30, 2015

ORDER GRANTING EXTENSION by Hon. William Alsup granting 84 Stipulation.(whalc1, COURT STAFF) (Filed on 10/30/2015)

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - October 22, 2015

ORDER RE NOTICE OF SETTLEMENT [re 80 STIPULATION WITH PROPOSED ORDER Joint Notice of Settlement in Principle filed by Ensure NanoTech…

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - September 15, 2015

ORDER RE EXTENSION OF CLAIM CONSTRUCTION BRIEFING AND INVALIDITY CONTENTIONS by Hon. William Alsup granting 80 Stipulation.(whalc1, COURT…

Ultratech State Court Decisions

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California California Northern District Court - June 5, 2015

ORDER DENYING DEFENDANT DONGJUN WANGS MOTION TO DISMISS by Hon. William Alsup denying 44 Motion to Dismiss.(whalc1, COURT STAFF) (Filed on…