APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
Granted: March 26, 2009
Application Number:
20090078374
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following…
HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS
Granted: January 1, 2009
Application Number:
20090004873
A dielectric etch chamber and method for improved control of plasma parameters. The plasma chamber comprises dual-frequency bias source that capacitively couples the RF energy to the plasma, and a single or dual frequency source that inductively couples the RF energy to the plasma. The inductive source may be modulated for improved etch uniformity.
FACILITY FOR DEPOSITING LUBRICANT COATING ON HARD MAGNETIC DISKS
Granted: October 23, 2008
Application Number:
20080257264
A facility for depositing lubricant coatings on hard magnetic disks includes load and unload vacuum locks in which cassettes carrying hard magnetic disks to be coated with a lubricant coating are turned 90°. Lubricant coatings are simultaneously deposited on a plurality of hard magnetic disks in a process module. Plural cassettes carrying the hard magnetic disks are simultaneously located in the load and unload vacuum locks. Plural cassettes carrying the hard magnetic disks are…
METHOD OF AND APPARATUS FOR MONITORING MASS FLOW RATE OF LUBRICANT VAPOR FORMING LUBRICANT COATINGS OF MAGNETIC DISKS
Granted: October 2, 2008
Application Number:
20080236481
Lubricant coatings are applied as lubricant vapor to magnetic disks in a lubricant vapor flow path between the disks and a reservoir for liquid lubricant that is heated to the vapor. The flow path includes a vapor chamber between the reservoir and an apertured diffuser. Plural piezoelectric crystals selectively, at different times, monitor the flow rate of lubricant vapor flowing in the vapor chamber, a result achieved by selectively positioning a shutter that is selectively opened and…
APPARATUS FOR AND METHOD OF APPLYING LUBRICANT COATINGS TO MAGNETIC DISKS VIA A VAPOR FLOW PATH INCLUDING A SELECTIVELY OPENED AND CLOSED SHUTTER
Granted: October 2, 2008
Application Number:
20080241366
Condensation is prevented on surfaces in a flow path for lubricant vapor that applies lubricant coatings to magnetic disks in the flow path. The vapor is derived by heating liquid in a reservoir. The flow path includes a vapor chamber between the reservoir and an apertured diffuser. The vapor chamber has a first wall extending in the same direction as a straight-line path between the reservoir and the disk and a second wall providing a heat conduction path between the heater and the…
APPARATUS FOR AND METHOD OF APPLYING LUBRICANT COATINGS TO MAGNETIC DISKS VIA A VAPOR FLOW PATH INCLUDING A SELECTIVELY OPENED AND CLOSED SHUTTER
Granted: October 2, 2008
Application Number:
20080241367
Lubricant coatings are applied as lubricant vapor to magnetic disks in a lubricant vapor flow path between the disks and a reservoir for liquid lubricant that is heated to the vapor. The flow path includes a vapor chamber between the reservoir, an apertured diffuser and a shutter for selectively and simultaneously unblocking and blocking the flow path. While the shutter is closed lubricant vapor stays in the vapor chamber. While the shutter is open the lubricant vapor flows via the flow…
MAGNETICALLY COUPLED VALVE ACTUATOR
Granted: August 14, 2008
Application Number:
20080191155
A valve assembly and method of actuating a valve blade in a processing chamber through the use of magnetic force coupling is disclosed. The valve assembly comprises a valve rod for imparting a reciprocal motion to a valve blade which opens and closes a valve, the valve rod having at least one magnet mounted thereupon. A housing seals the valve rod and valve blade from the ambient, and an actuator rod in the ambient, having at least one complementary magnet mounted thereupon, aligns with…
Backside thinning of image array devices
Granted: September 16, 2004
Application Number:
20040180462
Backthinning in an area selective manner is applied to imaging sensors 12 for use in electron bombarded devices. A further arrangement results in an array of collimators 51 aligned with pixels 42 or groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layer 52 on the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped…
BACKSIDE THINNING OF IMAGE ARRAY DEVICES
Granted: September 2, 2004
Application Number:
20040169248
Backthinning in an area selective manner is applied to imaging sensors 12 for use in electron bombarded devices. A further arrangement results in an array of collimators 51 aligned with pixels 42 or groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layer 52 on the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped…
Backthinned CMOS sensor with low fixed pattern noise
Granted: August 5, 2004
Application Number:
20040149888
This invention deals with the reduction in fixed pattern noise in backthinned CMOS imagers primarily for use in a vacuum environment. Reduction is achieved by effectively shielding the imager. This is done by depositing a conductive layer on the front surface prior to the attachment of a support member or by incorporating a conductive layer into the die at least extensive with the analog circuitry. This also may be achieved by leaving a void adjacent to the analog circuitry area. This…
