ACCELEROMETER COMMON MODE SELF-TEST
Granted: June 15, 2017
Application Number:
20170168088
An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A…
IDENTIFICATION AND COMPENSATION OF MEMS ACCELEROMETER ERRORS
Granted: June 15, 2017
Application Number:
20170168087
A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the…
ACCELEROMETER SENSE PATH SELF-TEST
Granted: June 15, 2017
Application Number:
20170168086
A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the…
MEMS SENSOR WITH COMPENSATION OF RESIDUAL VOLTAGE
Granted: June 15, 2017
Application Number:
20170168085
A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed…
RESIDUAL VOLTAGE SELF TEST
Granted: June 15, 2017
Application Number:
20170168084
A sensor such as an accelerometer includes a proof mass located opposite a plurality of electrodes located on a substrate. Some of the electrodes are auxiliary electrodes that apply an alternating current auxiliary signal to the proof mass while other electrodes are sense electrodes that sense movement of the proof mass. When a residual voltage is not present on the proof mass or on the sense electrodes, the forces imparted by the auxiliary signal onto the proof mass are substantially…
DUAL-SEALED MEMS PACKAGE WITH CAVITY PRESSURE MONITORING
Granted: June 15, 2017
Application Number:
20170167946
A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event…
IDENTIFICATION OF A SEAL FAILURE IN MEMS DEVICES
Granted: June 15, 2017
Application Number:
20170167945
A microelectromechanical sensor (MEMS) package includes a gyroscope and an accelerometer. The gyroscope is located within a low-pressure cavity that is sealed from an external pressure. The accelerometer is located within a cavity, and the seal for the accelerometer cavity is entirely within the gyroscope cavity. Under normal operating conditions, the accelerometer seal holds the accelerometer cavity at a higher pressure than the pressure of the enclosing gyroscope cavity. In the event…
GYROSCOPE WITH AUXILIARY SELF-TEST
Granted: June 15, 2017
Application Number:
20170167876
A gyroscope includes drive electrodes that drive a drive mass at a drive frequency. A sense mass is responsive to a Coriolis force caused by rotation of the gyroscope and oscillates based on the drive frequency. Electrodes adjacent to the sense mass drive the sense mass at test frequencies. The response to the driving at the test frequencies is measured and a gyroscope failure is identified based on this response.
SENSOR OUTPUT CONFIGURATION
Granted: May 4, 2017
Application Number:
20170122771
In a method of sensor output configuration, sensor output specifications for a plurality of sensor clients of a sensor are acquired. A first sensor output specification for a first of the sensor clients defines a first value for a sensor parameter. A second sensor output specification for a second of the sensor clients defines a second value for the sensor parameter. The first value and the second value are different. A sensor processing unit, which includes the sensor, is configured…
Distributed Automatic Level Control for a Microphone Array
Granted: January 5, 2017
Application Number:
20170006378
A distributed automatic level control function is provided, in which information relating to a common automatic level control parameter is transmitted to each of a plurality of microphone devices, wherein the information transmitted to at least one microphone device is derived from an audio sample of at least one different microphone device. Each microphone device produces the common automatic level control parameter based on the information received by the microphone device and applies…
GYROSCOPE AND IMAGE SENSOR SYNCHRONIZATION
Granted: November 24, 2016
Application Number:
20160341579
In a method of gyroscope operation, at an input of a gyroscope, a synchronization signal provided by an image sensor is received. The synchronization signal is associated with the capture of a portion of an image frame by the image sensor. Responsive to receipt of the synchronization signal by the gyroscope, the gyroscope generates gyroscope data that is substantially synchronized in time with the synchronization signal. The gyroscope outputs the gyroscope data for use in stabilization…
ESTIMATING HEADING MISALIGNMENT BETWEEN A DEVICE AND A PERSON USING OPTICAL SENSOR
Granted: August 4, 2016
Application Number:
20160224855
This disclosure is about a method and apparatus for estimating heading misalignment between a device and a person, where the device/apparatus comprises an optical sensor, the optical sensor capable of capturing an image of the person. At least one physical feature of the person is extracted from the image. A misalignment angle is estimated using the at least one physical feature of the person extracted from the image.
SYSTEMS AND METHODS FOR SENSOR CALIBRATION
Granted: June 23, 2016
Application Number:
20160178657
Systems and methods are disclosed for calibrating a sensor. A recursive least squares estimation may be performed to update a mean and a covariance matrix for samples of data from a motion sensor and a bias estimate for the motion sensor may be derived from the mean and covariance matrix. The motion sensor may be an gyroscope, an accelerometer or a magnetometer.
PACKAGING CONCEPT TO IMPROVE PERFORMANCE OF A MICRO-ELECTRO MECHANICAL (MEMS) MICROPHONE
Granted: January 14, 2016
Application Number:
20160014530
A size of a port hole in a package for a micro-electro-mechanical (MEMS) microphone can be modified to improve performance of the MEMS microphone while protecting the MEMS microphone from environmental interference. As an example, the port hole diameter is increased along a thickness of a substrate coupled to the MEMS microphone to reduce air mass loading and air flow resistance and thus, increase the resonant frequency, resonant peak, signal-to-noise ratio (SNR) and/or a range for flat…
ANTI-SCRATCHING PROTECTION FOR ACOUSTIC SENSORS
Granted: December 17, 2015
Application Number:
20150362589
An acoustic sensing element of an acoustic sensor and/or transducer can be covered with a composite material comprising a cover material and an anti-scratch material. In one aspect, an acoustic impedance of the cover material is lower than an acoustic impedance of the anti-scratch material. During acoustical sensing, the acoustic sensing element transmits an ultrasonic signal through the cover material and the anti-scratch material, which interferes with an object on (or near) the…
TOP PORT MICROELECTROMECHANICAL SYSTEMS MICROPHONE
Granted: December 3, 2015
Application Number:
20150350793
A top port microelectromechanical systems (MEMS) microphone is presented herein. A device can include a substrate and a MEMS acoustic sensor mechanically attached to the substrate utilizing anchors. Spaces between the anchors can connect a first back volume corresponding to a bottom portion of the MEMS acoustic sensor with a second back volume to form a combined back volume. An acoustic seal can be placed on the MEMS acoustic sensor, and an enclosure placed on the acoustic seal and…
SMART SENSOR FOR ALWAYS-ON OPERATION
Granted: December 3, 2015
Application Number:
20150350770
Smart sensors comprising one or more microelectromechanical systems (MEMS) sensors and a digital signal processor (DSP) in a sensor package are described. An exemplary smart sensor can comprise a MEMS acoustic sensor or microphone and a DSP housed in a package or enclosure comprising a substrate and a lid and a package substrate that defines a back cavity for the MEMS acoustic sensor or microphone. Provided implementations can also comprise a MEMS motion sensor housed in the package or…
SYSTEMS AND METHODS FOR DETERMINING POSITION USING A GEOFEATURE
Granted: November 26, 2015
Application Number:
20150341756
Systems and methods are disclosed for refining a coarse location determination by detecting patterns of motion sensor data that may be associated with predetermined locations. One or more geofeatures may be identified that cause a mobile device associated with a user to detect a distinguishable pattern of sensor data when the user interacts with the object. Accordingly, a coarse location may be refined using information associated with the geofeature, such as the location of the…
INTEGRATED PACKAGE CONTAINING MEMS ACOUSTIC SENSOR AND ENVIRONMENTAL SENSOR AND METHODOLOGY FOR FABRICATING SAME
Granted: November 12, 2015
Application Number:
20150321906
An integrated package of at least one environmental sensor and at least one MEMS acoustic sensor is disclosed. The package contains a shared port that exposes both sensors to the environment, wherein the environmental sensor measures characteristics of the environment and the acoustic sensor measures sound waves. The port exposes the environmental sensor to an air flow and the acoustic sensor to sound waves. An example of the acoustic sensor is a microphone and an example of the…
MEMS DEVICE WITH A STRESS-ISOLATION STRUCTURE
Granted: October 8, 2015
Application Number:
20150284239
A method and system for a MEMS device is disclosed. The MEMS device includes a free layer, with a first portion and a second portion. The MEMS device also includes a underlying substrate, the free layer movably positioned relative to the underlying substrate. The first portion and second portion of the free layer are coupled through at least one stem. A sense material is disposed over portions of the second portion of the free layer. Stress in the sense material and second portion of the…
