Drive mode and sense mode resonance frequency matching
Granted: January 21, 2020
Patent Number:
10538427
In some embodiments, a micro electro mechanical system (MEMS) includes a proof mass, sense electrodes, sense circuitry, and a frequency matching circuitry. The proof mass is configured to move responsive to stimuli. The sense electrodes are configured to generate a signal responsive to the proof mass moving. The sense circuitry is coupled to the sense electrodes. The sense circuitry is configured to receive the generated signal and further configured to process the generated signal. The…
System and method for drop detection
Granted: January 14, 2020
Patent Number:
10534014
A system and method for reliably detecting when a device has been dropped. In a non-limiting example, a drop detection system may be operable to perform one or more of: fall detection, end-of-fall detection, and/or detection of no motion after the fall. The drop detection system may, for example, analyze information from one or more MEMS sensors on-board the device to detect when the device has been dropped.
Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures
Granted: January 14, 2020
Patent Number:
10532926
A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure…
Configuration to reduce non-linear motion
Granted: January 7, 2020
Patent Number:
10527421
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is…
Elastic bump stops for MEMS devices
Granted: January 7, 2020
Patent Number:
10527420
A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further…
System and method for determining orientation of a device
Granted: December 24, 2019
Patent Number:
10514774
A method and system to a system to determine orientation of a device is disclosed. At least one sensor is provided. A quaternion is generated based on a signal generated by the sensor. The quaternion is indicative of the orientation of the device with reference to a stationary frame. Elements of the quaternion are compared to at least one predefined threshold value. A second signal is generated if the comparison is within the predefined threshold value.
System and method for MEMS sensor system synchronization
Granted: December 24, 2019
Patent Number:
10514279
Various aspects of this disclosure comprise systems and methods for synchronizing sensor data acquisition and/or output. For example, various aspects of this disclosure provide for achieving a desired level of timing accuracy in a MEMS sensor system, even in an implementation in which timer drift is substantial.
MEMS device and process for RF and low resistance applications
Granted: December 17, 2019
Patent Number:
10508022
MEMS device for low resistance applications are disclosed. In a first aspect, the MEMS device comprises a MEMS wafer including a handle wafer with one or more cavities containing a first surface and a second surface and an insulating layer deposited on the second surface of the handle wafer. The MEMS device also includes a device layer having a third and fourth surface, the third surface bonded to the insulating layer of the second surface of handle wafer; and a metal conductive layer on…
Proof mass and polysilicon electrode integrated thereon
Granted: December 10, 2019
Patent Number:
10505006
A method includes depositing a silicon layer over a first oxide layer that overlays a first silicon substrate. The method further includes depositing a second oxide layer over the silicon layer to form a composite substrate. The composite substrate is bonded to a second silicon substrate to form a micro-electro-mechanical system (MEMS) substrate. Holes within the second silicon substrate are formed by reaching the second oxide layer of the composite substrate. The method further includes…
Systems and methods for synchronizing sensor data
Granted: December 10, 2019
Patent Number:
10506163
A method for synchronizing data provided by an image sensor and a motion sensor rigidly linked together, comprising the steps of: obtaining image sensor data and motion sensor data; processing at least one of the image sensor data and the motion sensor data; extracting motion characteristics from filtering said processed data, wherein said filtering comprises at least applying a high pass filter; and synchronizing the image sensor data and the motion sensor data provided by the…
Systems and methods for interfacing a sensor and a processor
Granted: December 10, 2019
Patent Number:
10503501
Systems and methods are disclosed for abstracting a source of sensor data by translating data sink processor communications from a hardware-independent format to a hardware-dependent format and by translating data source portion communications from a hardware-dependent format to a hardware-independent format.
Systems and methods for determining a route traversed by a portable device
Granted: December 10, 2019
Patent Number:
10502571
Systems and methods are disclosed for determining location information for a portable device by identifying interactions indicating proximity between the user and a plurality of items. Each item may be associated with a known location to establish anchor points such that a route traversed by the portable device may be generated from the established anchor points and motion sensor data output by the portable device.
Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing
Granted: December 3, 2019
Patent Number:
10497747
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
Acoustic ambient temperature and humidity sensing
Granted: November 26, 2019
Patent Number:
10488274
Acoustic ambient temperature and humidity sensing based on determination of sound velocity is described, in addition to sensors, algorithms, devices, systems, and methods therefor. An exemplary embodiment employs sound velocity in the determination of ambient temperature and humidity. Provided implementations include determinations of sound velocity based on time of flight of a coded acoustic signal and/or based on resonance frequency of a Helmholtz resonator.
Electronic image stabilization of a captured image
Granted: November 12, 2019
Patent Number:
10477107
In a method of electronic image stabilization, a processor buffers image data into a memory buffer, the image data being obtained by the processor from an image sensor disposed in an electronic device. The processor obtains motion data from a motion sensor disposed in the electronic device, wherein the motion data corresponds with a time of capture of the image data. The processor analyzes the motion data to determine a stabilization correction to apply to the image data. The processor…
Image generation in an electronic device using ultrasonic transducers
Granted: November 12, 2019
Patent Number:
10474862
A method for generating an image is provided. The method comprises capturing a first set of image pixels by an ultrasonic sensor comprising an array of ultrasonic transducers using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of transmit signals routed to a plurality of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of image pixels at the ultrasonic sensor using a second beamforming…
Assembly and packaging of MEMS device
Granted: November 12, 2019
Patent Number:
10472231
A Micro Electro Mechanical systems (MEMS) device includes a solder bump on a substrate, a CMOS-MEMS die comprising a CMOS die and a MEMS die, and stud bumps on the CMOS die. The MEMS die is disposed between the CMOS die and the substrate. The stud bumps and the solder bumps are positioned to provide an electrical connection between the CMOS die and the substrate.
Out-of-plane sensing gyroscope robust to external acceleration and rotation
Granted: November 5, 2019
Patent Number:
10466053
A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane…
System and method for enhanced integrated navigation with wireless angle of arrival
Granted: November 5, 2019
Patent Number:
10469982
The present disclosure relates to a system and method for integrated navigation integrating wireless measurements including at least angle of arrival (AOA) measurements with a navigation solution. This integrated navigation system provides an enhanced integrated navigation solution of a device within a platform (such as for example person, vehicle, or vessel), wherein the device can be strapped or non-strapped within the platform, wherein the device is non-strapped the mobility of the…
Offset rejection electrodes
Granted: November 5, 2019
Patent Number:
10466268
A MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, wherein the sensing reference plane is divided by a first and a second axis forming four quadrants on the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, and a pattern of sensing elements on the sensing reference plane to detect motion normal of the at least…
