Conformal deposition of silicon carbide films
Patent Number 11894227 - February 6, 2024
Disclosed are methods and systems for providing silicon carbide films. A layer of silicon carbide can be provided under process conditions…
Films of desired composition and film properties
Patent Number 11680314 - June 20, 2023
Provided are methods and systems for providing silicon-containing films. The composition of the silicon-containing film can be controlled by…
Films of desired composition and film properties
Patent Number 11680315 - June 20, 2023
Provided are methods and systems for providing silicon-containing films. The composition of the silicon-containing film can be controlled by…
Electroplating apparatus for tailored uniformity profile
Patent Number 11549192 - January 10, 2023
An electroplating apparatus for electroplating metal on a substrate includes a plating chamber configured to contain an electrolyte, a…
Cleaning electroplating substrate holders using reverse current deplating
Patent Number 11542630 - January 3, 2023
Provided are cleaning methods and systems to remove unintended metallic deposits from electroplating apparatuses using reverse current…
SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING
Application Number 20180158683 - June 7, 2018
Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core…
IN-SITU DEPOSITION OF FILM STACKS
Application Number 20150013607 - January 15, 2015
An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…
APPARATUS FOR ADVANCED PACKAGING APPLICATIONS
Application Number 20140357089 - December 4, 2014
The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…
VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE
Application Number 20140348618 - November 27, 2014
A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…
METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION
Application Number 20140302689 - October 9, 2014
Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…
Plaintiff v. Defendant
California Central District Court - April 3, 2012
Tessitore v. Novellus Systems, Inc. et al
California Northern District Court - February 17, 2012
Poris v. Novellus Systems, Inc.
California Northern District Court - March 5, 2010
John Ryan v. Eric Lee, et al
U.S. Court of Appeals, Ninth Circuit - December 18, 2009
John Ryan v. Multnomah County District Atto, et al
U.S. Court of Appeals, Ninth Circuit - October 21, 2009
Tessitore v. Novellus Systems, Inc. et al
California Northern District Court - August 30, 2012
ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…
Poris v. Novellus Systems, Inc.
California Northern District Court - May 10, 2012
ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…
Poris v. Novellus Systems, Inc.
California Northern District Court - February 23, 2012
ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …
Poris v. Novellus Systems, Inc.
California Northern District Court - September 1, 2011
ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)
Poris v. Novellus Systems, Inc.
California Northern District Court - August 3, 2011
CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)
