Novellus Systems Profile

Novellus Systems Patent Grants

Dynamic current distribution control apparatus and method for wafer electroplating

Patent Number 10023970 - July 17, 2018

Methods, systems, and apparatus for plating a metal onto a work piece are described. In one aspect, an apparatus includes a plating chamber, a…

Electroplating apparatus for tailored uniformity profile

Patent Number 10017869 - July 10, 2018

Methods of electroplating metal on a substrate while controlling azimuthal uniformity, include, in one aspect, providing the substrate to the…

Method for reducing porogen accumulation from a UV-cure chamber

Patent Number 10020197 - July 10, 2018

Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a…

Method and apparatus for filling interconnect structures

Patent Number 10006144 - June 26, 2018

Methods, apparatus, and systems for depositing copper and other metals are provided. In some implementations, a wafer substrate is provided to…

Methods for depositing films on sensitive substrates

Patent Number 10008428 - June 26, 2018

Methods and apparatus to form films on sensitive substrates while preventing damage to the sensitive substrate are provided herein. In certain…

Novellus Systems Patent Applications

SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING

Application Number 20180158683 - June 7, 2018

Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core…

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)