Novellus Systems Profile

Novellus Systems Patent Grants

Radical source design for remote plasma atomic layer deposition

Patent Number 10316409 - June 11, 2019

A radical source for supplying radicals during atomic layer deposition semiconductor processing operations is provided. The radical source may…

Electroplating apparatus and process for wafer level packaging

Patent Number 10309024 - June 4, 2019

An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials…

Methods and apparatus for wetting pretreatment for through resist metal plating

Patent Number 10301738 - May 28, 2019

Disclosed are pre-wetting apparatus designs and methods. In some embodiments, a pre-wetting apparatus includes a degasser, a process chamber,…

Ultrahigh selective polysilicon etch with high throughput

Patent Number 10283615 - May 7, 2019

Provided are methods and apparatuses for removing a polysilicon layer on a wafer, where the wafer can include a nitride layer, a low-k…

Tungsten feature fill with nucleation inhibition

Patent Number 10256142 - April 9, 2019

Described herein are methods of filling features with tungsten, and related systems and apparatus, involving inhibition of tungsten…

Novellus Systems Patent Applications

SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING

Application Number 20180158683 - June 7, 2018

Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core…

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)