Novellus Systems Profile

Novellus Systems Patent Grants

Methods and apparatus for wetting pretreatment for through resist metal plating

Patent Number 10128102 - November 13, 2018

Disclosed are pre-wetting apparatus designs and methods for cleaning solid contaminants from substrates prior to through resist deposition of…

Purging of porogen from UV cure chamber

Patent Number 10121682 - November 6, 2018

A purge ring for providing a gas to a wafer processing chamber includes an inlet ring wall defining a ring hole space. An outer perimeter of…

Method and apparatus for rapid pump-down of a high-vacuum loadlock

Patent Number 10115608 - October 30, 2018

A gas expansion module for use with semiconductor wafer loadlocks and other regulated-pressure components of semiconductor processing tools is…

Protecting anodes from passivation in alloy plating systems

Patent Number 10106907 - October 23, 2018

An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials…

Tungsten feature fill

Patent Number 10103058 - October 16, 2018

Described herein are methods of filling features with tungsten and related systems and apparatus. The methods include inside-out fill…

Novellus Systems Patent Applications

SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING

Application Number 20180158683 - June 7, 2018

Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core…

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)