Novellus Systems Profile

Novellus Systems Patent Grants

Configuration and method of operation of an electrodeposition system for improved process stability and performance

Patent Number 9816193 - November 14, 2017

Methods, systems, and apparatus for plating a metal onto a work piece with a plating solution having a low oxygen concentration are described.…

Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte

Patent Number 9816196 - November 14, 2017

Apparatus and methods for electroplating metal onto substrates are disclosed. The electroplating apparatus comprise an electroplating cell and…

Methods for depositing films on sensitive substrates

Patent Number 9786570 - October 10, 2017

Methods and apparatus to form films on sensitive substrates while preventing damage to the sensitive substrate are provided herein. In certain…

Detection of plating on wafer holding apparatus

Patent Number 9746427 - August 29, 2017

The embodiments herein relate to methods and apparatus for detecting whether unwanted metallic deposits are present on a bottom of a substrate…

Wafer chuck with aerodynamic design for turbulence reduction

Patent Number 9732416 - August 15, 2017

A rotatable wafer chuck includes chuck arms and wafer holders that are aerodynamically shaped to reduce turbulence during rotation. A wafer…

Novellus Systems Patent Applications

IN-SITU DEPOSITION OF FILM STACKS

Application Number 20150013607 - January 15, 2015

An apparatus for depositing film stacks in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a…

APPARATUS FOR ADVANCED PACKAGING APPLICATIONS

Application Number 20140357089 - December 4, 2014

The embodiments disclosed herein pertain to novel methods and apparatus for removing material from a substrate. In certain embodiments, the…

VACUUM ROBOT WITH LINEAR TRANSLATION CARRIAGE

Application Number 20140348618 - November 27, 2014

A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the…

METHODS AND APPARATUS FOR DIELECTRIC DEPOSITION

Application Number 20140302689 - October 9, 2014

Methods for depositing flowable dielectric films are provided. In some embodiments, the methods involve introducing a silicon-containing…

CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

Application Number 20140238608 - August 28, 2014

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent…

Novellus Systems Federal District Court Decisions

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - August 30, 2012

ORDER CONTINUING CASE MANAGEMENT CONFERENCE re 6 Case Management Statement filed by James Tessitore. Joint Case Management Statement due…

Poris v. Novellus Systems, Inc.

California Northern District Court - May 10, 2012

ORDER GRANTING 85 STIPULATION Regarding Briefing and Hearing Schedule for Parties' Motions for Summary Judgment. Responses due by…

Poris v. Novellus Systems, Inc.

California Northern District Court - February 23, 2012

ORDER GRANTING 78 STIPULATION Regarding Briefing and Hearing Schedule as to 77 Motion for Summary Judgment of Non-Infringement. …

Poris v. Novellus Systems, Inc.

California Northern District Court - September 1, 2011

ORDER GRANTING 74 Stipulation selecting Mediation. Signed by Judge Jeffrey S. White on 9/1/11. (jjoS, COURT STAFF) (Filed on 9/1/2011)

Poris v. Novellus Systems, Inc.

California Northern District Court - August 3, 2011

CLAIM CONSTRUCTION ORDER. Signed by Judge Jeffrey S. White on 8/3/11. (jjoS, COURT STAFF) (Filed on 8/3/2011)