Packaged Microphone with Multiple Mounting Orientations
Granted: February 12, 2015
Application Number:
20150041929
A packaged microphone has a base and a lid that at least in part form a package having a plurality of exterior sides and an interior chamber. The packaged microphone also has a flexible substrate having a first portion within the interior chamber, and a second portion, extending from the interior chamber, having at least two sets of pads. A MEMS microphone die is mounted to the first portion of the flexible substrate, and each set of pads is in electrical communication with the…
APPARATUS AND METHOD FOR REDUCED STRAIN ON MEMS DEVICES
Granted: January 22, 2015
Application Number:
20150021718
A method and apparatus for coupling a MEMS device to a substrate is disclosed. The method includes providing a substrate with a conductor disposed over the substrate, adhering the MEMS device to the substrate, wherein a first elastomer adheres the MEMS device to the substrate. The MEMS device is electrically connected to the conductor using a wire bond.
CAPACITIVE SENSING STRUCTURE WITH EMBEDDED ACOUSTIC CHANNELS
Granted: December 11, 2014
Application Number:
20140361388
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the top membrane and the electrode and the interconnecting structure defines a spacing between the top membrane and the bottom membrane.
MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER
Granted: September 18, 2014
Application Number:
20140266170
A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the…
MULTIPLE, PER SENSOR CONFIGURABLE FIFOS IN A SINGLE STATIC RANDOM ACCESS MEMORY (SRAM) STRUCTURE
Granted: September 18, 2014
Application Number:
20140281341
A device includes one or more sensors, one or more processors, one or more sensors, and a memory. The memory has a first portion, a second portion, and a third portion. The first portion is allocated to storing instructions for execution by the one or more processors. The second portion is allocated to storing data generated by the one or more processor, and the third portion is allocated to storing data from the one or more sensors. The third portion being a first-in-first-out (FIFO)…
METHOD TO REDUCE DATA RATES AND POWER CONSUMPTION USING DEVICE BASED ATTITUDE QUATERNION GENERATION
Granted: September 18, 2014
Application Number:
20140278217
A method includes generating motion data by receiving a gyroscope data from a gyroscope sensor, performing integration using the gyroscope data and generating an integrated gyroscope data using a first processor. The method further includes receiving a data from one or more sensors, other than the gyroscope sensor, and performing sensor fusion using the integrated gyroscope data and the data to generate motion data using a second processor.
METHOD TO REDUCE DATA RATES AND POWER CONSUMPTION USING DEVICE BASED ATTITUDE GENERATION
Granted: September 18, 2014
Application Number:
20140278215
A method includes generating motion data by receiving a gyroscope data from a gyroscope sensor, performing integration using the gyroscope data and generating an integrated gyroscope data using a first processor. The method further includes receiving a data from one or more sensors, other than the gyroscope sensor, and performing sensor fusion using the integrated gyroscope data and the data to generate motion data using a second processor.
EMBEDDED PROCESSOR ON AN INTEGRATED MEMS SENSOR CHIP AUTONOMOUSLY MANAGING EXTERNAL SENSOR
Granted: September 18, 2014
Application Number:
20140278205
A device and method for managing external sensors are disclosed. The device comprises at least one embedded processor and a memory device and at least one bus controller that can be used by the embedded processors to communicate with external sensors. The embedded processor includes a mechanism to receive a control input to retrieve raw data from at least one sensor external to the device. The embedded processors may include another mechanism to receive a control input interrupting the…
HEADING CONFIDENCE INTERVAL ESTIMATION
Granted: September 18, 2014
Application Number:
20140278183
An inertial measurement system is disclosed. The inertial measurement system has an accelerometer processing unit that generates a calibrated accelerometer data. The inertial measurement system further includes a magnetometer processing unit generates a calibrated magnetometer data, and a gyroscope processing unit generates a calibrated gyroscope data. Using the calibrated accelerometer data, the calibrated magnetometer data, and the calibrated gyroscope data, the inertial measurement…
LINEAR CAPACITIVE DISPLACEMENT SENSOR
Granted: September 18, 2014
Application Number:
20140266256
A method and system for measuring displacement of a structure is disclosed. The method and system comprise providing a first capacitance and providing a second capacitance. The first and second capacitances share a common terminal. The method and system further include determining a difference of the inverses of the value of the first and second capacitances when the structure is displaced. The first capacitance varies in inverse relation to the displacement of the structure.
ELASTIC BUMP STOPS FOR MEMS DEVICES
Granted: September 18, 2014
Application Number:
20140260613
A MEMS device includes at least one proof mass, the at least one proof mass is capable of moving to contact at least one target structure. The MEMS device further includes at least one elastic bump stop coupled to the proof mass and situated at a first distance from the target structure. The MEMS device additionally includes at least one secondary bump stop situated at a second distance from the target structure, wherein the second distance is greater than the first distance, and further…
MEMS ACOUSTIC SENSOR WITH INTEGRATED BACK CAVITY
Granted: September 18, 2014
Application Number:
20140264656
A MEMS device is disclosed. The MEMS device comprises a first plate with a first surface and a second surface; and an anchor attached to a first substrate. The MEMS device further includes a second plate with a third surface and a fourth surface attached to the first plate. A linkage connects the anchor to the first plate, wherein the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate.…
SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE
Granted: September 18, 2014
Application Number:
20140264655
In an integrated MEMS device, moving silicon parts with smooth surfaces can stick together if they come into contact. By roughening at least one smooth surface, the effective area of contact, and therefore surface adhesion energy, is reduced and hence the sticking force is reduced. The roughening of a surface can be provided by etching the smooth surfaces in gas, plasma, or liquid with locally non-uniform etch rate. Various etch chemistries and conditions lead to various surface…
ACOUSTIC SENSOR WITH INTEGRATED PROGRAMMABLE ELECTRONIC INTERFACE
Granted: September 18, 2014
Application Number:
20140264652
An integrated MEMS acoustic sensor has a MEMS transducer and a programmable electronic interface. The programmable electronic interface includes non-volatile memory and is coupled to the MEMS transducer. Using programmable electrical functions, the programmable electronic interface is operable to sense variations in the MEMS transducer caused by application of an acoustic pressure to the MEMS transducer.
Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same
Granted: September 18, 2014
Application Number:
20140264650
A microphone system includes a diaphragm suspended by springs and including a sealing layer that seals passageways which, if left open, would degrade the microphone's frequency response by allowing air to pass from one side of the diaphragm to the other when the diaphragm is responding to an incident acoustic signal. In some embodiments, the sealing layer may include an equalization aperture to allow pressure to equalize on both sides of the diaphragm.
INTEGRATED STRUCTURE WITH BIDIRECTIONAL VERTICAL ACTUATION
Granted: September 18, 2014
Application Number:
20140264645
A Micro-Electro-Mechanical Systems (MEMS) device includes a first substrate with a first surface and a second surface, the first substrate including a base layer, a moveable beam disposed on the base layer, at least one metal layer, and one or more standoffs disposed on the base layer such that one or more metal layers are situated on the top surface of the one or more standoffs. The MEMS device further includes a second substrate including one or more metal layers bonded to the one or…
DUTY-CYCLED GYROSCOPE
Granted: September 18, 2014
Application Number:
20140260713
A gyroscope system comprises a MEMS gyroscope coupled to a drive system and a sense system. The drive system maintains the MEMS gyroscope in a state of oscillation and the sense system for receiving, amplifying, and demodulating an output signal of the MEMS gyroscope that is indicative of the rate of rotation. The gyroscope system further includes a phase-locked look (PLL) which receives a reference clock (REFCLK) from the drive system and produces a system clock (CLK). Finally, the…
DEVICE AND SYSTEM FOR INTEGRATED SENSOR SYSTEM (ISS)
Granted: September 18, 2014
Application Number:
20140260704
The present invention is directed toward a device and system having a sensor hub capable of receiving measurement outputs from a plurality of sensors and processing the measurements for output to other devices, from a single chip arrangement. The sensor hub provides for facilitating efficient communication among the sensors for improved high-level features, such as interpreting gestures or actions according to the context.
PRESSURE SENSOR STABILIZATION
Granted: September 18, 2014
Application Number:
20140260647
A pressure sensor is provided which produces a measurement of the displacement and a measurement of a natural frequency of the diaphragm which are then combined to produce a compensated measurement of the displacement of the diaphragm, thereby substantially eliminating the dependence of the compensated displacement measurement on strain.
ROUND-ROBIN SENSING DEVICE AND METHOD OF USE
Granted: September 18, 2014
Application Number:
20140260619
A round-robin sensing device is disclosed. The round-robin sensing device comprises a MEMS device, wherein the MEMS device includes first and second sense electrodes. The round-robin sensing device also comprises a multiplexer coupled to the first and second sense electrodes, at least one sense amplifier coupled to the multiplexer, a demodulator coupled to the at least one sense amplifier, and an integrate and dump circuit coupled to the demodulator. Finally, the round-robin sensing…
