InvenSense Patent Grants

Distributed automatic level control for a microphone array

Granted: June 12, 2018
Patent Number: 9998825
A distributed automatic level control function is provided, in which information relating to a common automatic level control parameter is transmitted to each of a plurality of microphone devices, wherein the information transmitted to at least one microphone device is derived from an audio sample of at least one different microphone device. Each microphone device produces the common automatic level control parameter based on the information received by the microphone device and applies…

Acoustically configurable microphone

Granted: May 22, 2018
Patent Number: 9980069
Various embodiments provide for an acoustically configurable microphone device that can adjust various parameters affecting sensitivity, acoustic overload point, signal to noise ratio, sample rate, and other parametric choices that affect the performance and function of the acoustic sensor based on commands received via acoustic communications. An acoustic analysis engine can analyze acoustic communications received to determine whether or not the acoustic communication contains a…

Microphone distortion reduction

Granted: May 22, 2018
Patent Number: 9980046
Microphone distortion reduction is presented herein. A system can comprise: a processor; and a memory that stores executable instructions that, when executed by the processor, facilitate performance of operations, comprising: obtaining a pressure-in to voltage-out transfer function representing a distortion of an output of a microphone corresponding to a stimulus of a defined sound pressure level that has been applied to the microphone; inverting an equation representing the pressure-in…

Integration of AIN ultrasonic transducer on a CMOS substrate using fusion bonding process

Granted: May 22, 2018
Patent Number: 9975763
Provided herein is a method including bonding a first oxide layer on a handle substrate to a second oxide layer on a complementary metal oxide semiconductor (“CMOS”), wherein the fusion bonding forms a unified oxide layer including a diaphragm overlying a cavity on the CMOS. The handle substrate is removed leaving the unified oxide layer. A piezoelectric film stack is deposited over the unified oxide layer. Vias are formed in the piezoelectric film stack and the unified oxide layer.…

Systems and methods for determining position using a geofeature

Granted: May 1, 2018
Patent Number: 9961506
Systems and methods are disclosed for refining a coarse location determination by detecting patterns of motion sensor data that may be associated with predetermined locations. One or more geofeatures may be identified that cause a mobile device associated with a user to detect a distinguishable pattern of sensor data when the user interacts with the object. Accordingly, a coarse location may be refined using information associated with the geofeature, such as the location of the…

Pressure sensor

Granted: May 1, 2018
Patent Number: 9958349
A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

Configuration to reduce non-linear motion

Granted: May 1, 2018
Patent Number: 9958271
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is…

Offset rejection electrodes

Granted: April 24, 2018
Patent Number: 9952252
A system and method for reducing offset in a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a sensing reference plane, at least one anchor coupled to the sensing reference plane, at least one proof mass coupled to the at least one anchor, wherein one of the at least one proof mass moves under an external excitation, a pattern of sensing elements coupled between the sensing reference plane and the at least one proof mass to detect motion normal to…

Systems and methods for time stamping sensor data

Granted: April 10, 2018
Patent Number: 9939838
Systems and methods are disclosed for providing sensor data to a host processor. A sequence of data samples may be generated at a sample rate established by a clock source associated with the sensor. A time stamp derived from another clock source, such as the clock employed by the host processor, is assigned to at least one of each periodically retrieved data samples. As such, at least one of the assigned time stamps then may be adjusted by applying a correction determined from a timing…

Microelectromechanical systems (MEMS) microphone array with dedicated amplifiers

Granted: April 3, 2018
Patent Number: 9936289
Microelectromechanical systems (MEMS) acoustic sensors are implemented with dedicated preamplifiers. Provided implementations can comprise an array of MEMS acoustic sensor elements each having a dedicated preamplifier. A summation node can add outputs of each preamplifier and an analog to digital converter (ADC) can receive the summed outputs. Other implementations can comprise an array of MEMS acoustic sensors each having dedicated preamplifiers. Some of the preamplifiers receive an…

Acoustic ambient temperature and humidity sensing

Granted: April 3, 2018
Patent Number: 9933319
Acoustic ambient temperature and humidity sensing based on determination of sound velocity is described, in addition to sensors, algorithms, devices, systems, and methods therefor. An exemplary embodiment employs sound velocity in the determination of ambient temperature and humidity. Provided implementations include determinations of sound velocity based on time of flight of a coded acoustic signal and/or based on resonance frequency of a Helmholtz resonator.

Interference cancellation for throat microphone

Granted: March 27, 2018
Patent Number: 9930445
A throat microphone may include one or more transducers that are in contact with the skin in the region of the larynx of person, and may provide a vibration signal to a processing unit. The vibration signal may also include energy and information relating to secondary physiological phenomena such as breathing and heartbeat, in addition to the desired sonic signal. The processing unit may utilize information relating to the secondary physiological phenomena to control a filter that…

Always-on sensor device for human touch

Granted: March 27, 2018
Patent Number: 9928398
Always-on or nearly always-on sensing of human touch at a device is provided. The sensing is split into a low-power detection stage and a full-power analysis stage, where the detection stage is implemented continually or nearly continually and causes system circuitry to perform analysis of the human touch after the low-power detection stage has confirmed the human touch. The sensing permits avoiding the reliance on physical actuation of a trigger prior to analysis of human touch.

Methods for stiction reduction in MEMS sensors

Granted: March 27, 2018
Patent Number: 9926192
A method of the invention includes reducing stiction of a MEMS device by providing a conductive path for electric charge collected on a bump stop formed on a substrate. The bump stop is formed by depositing and patterning a dielectric material on the substrate, and the conductive path is provided by a conductive layer deposited on the bump stop. The conductive layer can also be roughened to reduce stiction.

Blockage detection for a microelectromechanical systems sensor

Granted: March 20, 2018
Patent Number: 9924288
Systems and techniques for detecting blockage associated with a microelectromechanical systems (MEMS) microphone of a device are presented. The device includes a MEMS acoustic sensor and a processor. The MEMS acoustic sensor is contained in a cavity within the device. The processor is configured to detect a blockage condition associated with an opening of the cavity that contains the MEMS acoustic sensor.

Systems and methods for determining linear acceleration

Granted: March 20, 2018
Patent Number: 9921335
Systems and methods are disclosed for deriving linear acceleration using an accelerometer. The orientation of a device may be determined using only accelerometer data. The determined orientation may then be used to determine a gravity vector, such that linear acceleration may be derived by subtracting the gravity vector from accelerometer data.

Systems and methods for mask reduction techniques

Granted: March 20, 2018
Patent Number: 9919920
Systems and methods are provided for fabricating a microelectromechanical system (MEMS) sensor system. A first conductive layer is provided over a pad. A second conductive layer is provided over the pad, over an outgassing layer, and over a conductive bump stop structure. A first etch is performed to remove a portion of the second conductive layer over the pad. A second etch is performed, using a single mask, to remove a portion of the first conductive layer over the pad and to remove…

Method and system for MEMS devices with dual damascene formed electrodes

Granted: March 20, 2018
Patent Number: 9919915
Methods and systems for MEMS devices with dual damascene formed electrodes is disclosed and may include forming first and second dielectric layers on a semiconductor substrate that includes a conductive layer at least partially covered by the first dielectric layer; removing a portion of the second dielectric layer; forming vias through the second dielectric layer and at least a portion of the second dielectric layer, where the via extends to the conductive layer; forming electrodes by…

Method and apparatus for improved navigation for cycling

Granted: March 13, 2018
Patent Number: 9915534
A method and apparatus for providing an enhanced navigation solution for cycling applications is described herein. The navigation solution is about a device within a platform, which is a cycling platform such as for example a bicycle, a tricycle, or a unicycle amongst others. The device can be in any orientation with respect to the platform (such as for example in any location or orientation on the body of the cyclist). The device includes a sensor assembly. The sensors in the device may…

MEMS device mechanical amplitude control

Granted: February 27, 2018
Patent Number: 9903718
A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting…