CMOS-MEMS structures with out-of-plane MEMS sensing gap
Granted: February 20, 2018
Patent Number:
9896327
A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring…
MEMS device with improved spring system
Granted: February 13, 2018
Patent Number:
9891053
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.
Reducing resonance peaks and drive tones from a micro-electro-mechanical system gyroscope response
Granted: February 6, 2018
Patent Number:
9885577
Reducing noise from drive tone and sense resonance peaks of a micro-electro-mechanical system (MEMS) gyroscope output using a notch filter is presented herein. The MEMS gyroscope can include a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to detect a deflection of the sensor mass, and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component…
Method to reduce data rates and power consumption using device based attitude quaternion generation
Granted: January 30, 2018
Patent Number:
9880185
A method includes generating motion data by receiving a gyroscope data from a gyroscope sensor, performing integration using the gyroscope data and generating an integrated gyroscope data using a first processor. The method further includes receiving a data from one or more sensors, other than the gyroscope sensor, and performing sensor fusion using the integrated gyroscope data and the data to generate motion data using a second processor.
Pressure sensor stabilization
Granted: January 30, 2018
Patent Number:
9880063
A pressure sensor is provided which produces a measurement of the displacement and a measurement of a natural frequency of the diaphragm which are then combined to produce a compensated measurement of the displacement of the diaphragm, thereby substantially eliminating the dependence of the compensated displacement measurement on strain.
Method and system for providing a plurality of navigation solutions
Granted: January 30, 2018
Patent Number:
9880005
Systems and methods are disclosed for providing a plurality of navigation solutions using a portable sensor device associated with a user. Motion sensor data may be used to derive a first navigation solution using the obtained sensor data under a first set of processing conditions navigation solution and to derive at least a second navigation solution using the sensor data under a second set of processing conditions, wherein the second navigation solution is refined as compared to the…
Cavity pressure modification using local heating with a laser
Granted: January 30, 2018
Patent Number:
9878902
A method and system for changing a pressure within at least one enclosure in a MEMS device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. In a second aspect, the system comprises a MEMS device that includes a first substrate, a second substrate…
Noise mitigating microphone system
Granted: January 16, 2018
Patent Number:
9872112
A microphone system has a package with a top, a bottom, and four sides that at least in part form an interior chamber. One of the sides forms an inlet aperture for communicating the inlet chamber with the exterior environment. The system also has first and second microphone dies, in a stacked relationship, respectively having a first and second diaphragms. A circuit die, positioned in electrical communication with the first and second microphone dies, is configured to mitigate…
MEMS-CMOS device that minimizes outgassing and methods of manufacture
Granted: January 9, 2018
Patent Number:
9862593
A MEMS device is disclosed. The MEMS device includes a first substrate. At least one structure is formed within the first substrate. The first substrate includes at least one first conductive pad thereon. The MEMS device also includes a second substrate. The second substrate includes a passivation layer. The passivation layer includes a plurality of layers. A top layer of the plurality of layers comprises an outgassing barrier layer. At least one second conductive pad and at least one…
MEMS sensor with decoupled drive system
Granted: January 9, 2018
Patent Number:
9863769
In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis…
Integrated package forming wide sense gap micro electro-mechanical system microphone and methodologies for fabricating the same
Granted: January 2, 2018
Patent Number:
9860649
A micro electro-mechanical system (MEMS) microphone is provided. The microphone includes: a package substrate having a port disposed through the package substrate, wherein the port is configured to receive acoustic waves; and a lid coupled to the substrate and forming a package. The MEMS microphone also includes a MEMS acoustic sensor disposed in the package and positioned such that the acoustic waves receivable at the port are incident on the MEMS acoustic sensor. The MEMS acoustic…
MEMS rotation sensor with integrated electronics
Granted: December 19, 2017
Patent Number:
9846175
A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of…
Translating Z axis accelerometer
Granted: December 12, 2017
Patent Number:
9840409
A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof…
High-Q MEMS gyroscope
Granted: December 5, 2017
Patent Number:
9835454
A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained…
Integrated CMOS back cavity acoustic transducer and the method of producing the same
Granted: November 28, 2017
Patent Number:
9828240
A MEMS device includes a MEMS substrate with a movable element. Further included is a CMOS substrate with a cavity, the MEMS substrate disposed on top of the CMOS substrate. Additionally, a back cavity is connected to the CMOS substrate, the back cavity being formed at least partially by the cavity in the CMOS substrate and the movable element being acoustically coupled to the back cavity.
MEMS cavity substrate
Granted: November 28, 2017
Patent Number:
9828238
In accordance with an example embodiment of this disclosure, a micro-electro-mechanical system (MEMS) device comprises a substrate, a CMOS die, and a MEMS die, each of which comprises a top side and a bottom side. The bottom side of the CMOS die is coupled to the top side of the substrate, and the MEMS die is coupled to the top side of the CMOS die, and there is a cavity positioned between the CMOS die and the substrate. The cavity may be sealed by a sealing substance, and may be filled…
Estimating heading misalignment between a device and a person using optical sensor
Granted: November 14, 2017
Patent Number:
9818037
This disclosure is about a method and apparatus for estimating heading misalignment between a device and a person, where the device/apparatus comprises an optical sensor, the optical sensor capable of capturing an image of the person. At least one physical feature of the person is extracted from the image. A misalignment angle is estimated using the at least one physical feature of the person extracted from the image.
Deduced reckoning navigation without a constraint relationship between orientation of a sensor platform and a direction of travel of an object
Granted: November 14, 2017
Patent Number:
9816819
Systems, methods, and apparatus for performing deduced reckoning navigation without a constraint relationship between orientation of a sensor platform and a direction of travel of an object are described herein. A sensor fusion component can be configured to receive data from sensors of a sensor platform coupled to a pedestrian; and generate world coordinate information based on the data. Further, a gait recognition component can be configured to record one or more walking patterns of…
Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same
Granted: November 7, 2017
Patent Number:
9809448
A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated…
CMOS-MEMS integration using metal silicide formation
Granted: November 7, 2017
Patent Number:
9809450
A method and system for forming a MEMS device are disclosed. In a first aspect, the method comprises providing a conductive material over at least a portion of a top metal layer of a base substrate, patterning the conductive material and the at least a portion of the top metal layer, and bonding the conductive material with a device layer of a MEMS substrate via metal silicide formation. In a second aspect, the MEMS device comprises a MEMS substrate, wherein the MEMS substrate includes a…
