KLA-Tencor Profile

KLA-Tencor Patent Grants

Three-dimensional mapping of a wafer

Patent Number 10317198 - June 11, 2019

Methods and scatterometry overlay metrology tools are provided, which scan a wafer region, perform focus measurements during the scanning to…

Speed enhancement of chromatic confocal metrology

Patent Number 10317344 - June 11, 2019

Systems and methods for height measurements, such as those for bumps, pillars, or film thickness, can use chromatic confocal techniques. The…

Determining information for defects on wafers

Patent Number 10317347 - June 11, 2019

Systems and methods for determining information for defects on a wafer are provided. One system includes an illumination subsystem configured…

All reflective wafer defect inspection and review systems and methods

Patent Number 10309907 - June 4, 2019

Disclosed are methods and apparatus for reflecting, towards a sensor, an Infrared to vacuum ultra-violet (VUV) light that is reflected from a…

Dual-column-parallel CCD sensor and inspection systems using a sensor

Patent Number 10313622 - June 4, 2019

A dual-column-parallel image CCD sensor utilizes a dual-column-parallel readout circuit including two pairs of cross-connected transfer gates…

KLA-Tencor Patent Applications

HERMETIC SEALING OF A NONLINEAR CRYSTAL FOR USE IN A LASER SYSTEM

Application Number 20190094653 - March 28, 2019

Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO…

METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION

Application Number 20190003960 - January 3, 2019

Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample. The method includes…

METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION

Application Number 20180364177 - December 20, 2018

This system comprises an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer.…

APPARATUS AND METHODS FOR MEASURING PHASE AND AMPLITUDE OF LIGHT THROUGH A LAYER

Application Number 20180340886 - November 29, 2018

In one embodiment, disclosed are apparatus, methods, and targets for determining a phase shift of a photomask having a phase-shift target. An…

INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS

Application Number 20180238816 - August 23, 2018

Disclosed are methods and systems for inspecting photolithographic reticles. A first and second reticle that were fabricated with a same…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - May 23, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - March 19, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]

United States US Court of Appeals, Federal Circuit - March 14, 2019

Xitronix Corporation v. KLA-Tencor Corporation

United States US Court of Appeals, Fifth Circuit - February 15, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - June 15, 2018

KLA-Tencor Federal Appellate Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - May 23, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - March 19, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]

US Court of Appeals for the Federal Circuit - March 14, 2019

Xitronix Corporation v. KLA-Tencor Corporation

US Court of Appeals for the Fifth Circuit - February 15, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - June 15, 2018