KLA-Tencor Profile

KLA-Tencor Patent Grants

Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line

Patent Number 9823121 - November 21, 2017

A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The…

Method and apparatus for non-contact measurement of internal quantum efficiency in light emitting diode structures

Patent Number 9823198 - November 21, 2017

Non-contact measurement of one or more electrical response characteristics of a LED structure includes illuminating an illumination area of a…

Compac X-ray source for semiconductor metrology

Patent Number 9826614 - November 21, 2017

Methods and systems for realizing a high brightness, compact x-ray source suitable for high throughput, in-line x-ray metrology are presented…

Measurement of multiple patterning parameters

Patent Number 9816810 - November 14, 2017

Methods and systems for evaluating the performance of multiple patterning processes are presented. Patterned structures are measured and one…

Virtual inspection systems with multiple modes

Patent Number 9816939 - November 14, 2017

Methods and systems for determining one or more characteristics for defects detected on a specimen are provided. One system includes one or…

KLA-Tencor Patent Applications

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Application Number 20170336198 - November 23, 2017

Disclosed is a method for determining an overlay error between at least two layers in a multiple layer sample. An imaging optical system is…

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHANCE DEFECT DETECTION

Application Number 20170307545 - October 26, 2017

Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first…

APPARATUS AND METHODS FOR PREDICTING WAFER-LEVEL DEFECT PRINTABILITY

Application Number 20170309008 - October 26, 2017

Disclosed are methods and apparatus for qualifying a photolithographic reticle. A reticle inspection tool is used to acquire images at…

METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION

Application Number 20170276613 - September 28, 2017

Disclosed are methods and apparatus for inspecting a semiconductor sample. This system comprises an illumination optics subsystem for…

MACHINE LEARNING METHOD AND APPARATUS FOR INSPECTING RETICLES

Application Number 20170221190 - August 3, 2017

Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Benjamin Lanford v. Edward W. Barnholt, and KLA-Tencor Corp.

Delaware Court of Chancery - March 17, 2009