KLA-Tencor Profile

KLA-Tencor Patent Grants

Image based specimen process control

Patent Number 10181185 - January 15, 2019

Methods and systems for detecting anomalies in images of a specimen are provided. One system includes one or more computer subsystems…

System and method for high throughput work-in-process buffer

Patent Number 10177020 - January 8, 2019

A buffer system for a semiconductor device fabrication tool includes one or more retractable shelves, one or more sliding assemblies…

Structure for achieving dimensional stability during temperature changes

Patent Number 10168261 - January 1, 2019

A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the…

Methods and apparatus for polarizing reticle inspection

Patent Number 10168273 - January 1, 2019

Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample. The method includes…

Optical measurement of bump hieght

Patent Number 10168524 - January 1, 2019

A method of generating 3D information including: varying the distance between the sample and an objective lens of the optical microscope at…

KLA-Tencor Patent Applications

METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION

Application Number 20190003960 - January 3, 2019

Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample. The method includes…

METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION

Application Number 20180364177 - December 20, 2018

This system comprises an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer.…

APPARATUS AND METHODS FOR MEASURING PHASE AND AMPLITUDE OF LIGHT THROUGH A LAYER

Application Number 20180340886 - November 29, 2018

In one embodiment, disclosed are apparatus, methods, and targets for determining a phase shift of a photomask having a phase-shift target. An…

INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS

Application Number 20180238816 - August 23, 2018

Disclosed are methods and systems for inspecting photolithographic reticles. A first and second reticle that were fabricated with a same…

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO LAYERS

Application Number 20180100735 - April 12, 2018

A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - June 15, 2018

Xitronix Corp. v. KLA-Tencor Corp.

United States US Court of Appeals, Federal Circuit - February 9, 2018

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - August 24, 2015

ORDER DENYING, ORDER Defendant KLA-Tencor Corporation's 15 MOTION to Amend Order to Certify Issue for Interlocutory Appeal. Signed by…

Xitronix Corporation v. KLA-Tencor Corporation

Texas Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

KLA-Tencor Federal Appellate Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - June 15, 2018

Xitronix Corp. v. KLA-Tencor Corp.

US Court of Appeals for the Federal Circuit - February 9, 2018