Inspection of reticles using machine learning
Patent Number 12094101 - September 17, 2024
Disclosed are methods and apparatus for inspecting a photolithographic reticle. A plurality of reference far field images are simulated by…
Reduction or elimination of pattern placement error in metrology measurements
Patent Number 12013634 - June 18, 2024
Metrology methods and targets are provided for reducing or eliminating a difference between a device pattern position and a target pattern…
Reducing device overlay errors
Patent Number 11971664 - April 30, 2024
Process control methods, metrology targets and production systems are provided for reducing or eliminating process overlay errors. Metrology…
Process monitoring of deep structures with X-ray scatterometry
Patent Number 11955391 - April 9, 2024
Methods and systems for estimating values of process parameters, structural parameters, or both, based on x-ray scatterometry measurements of…
Optical near-field metrology
Patent Number 11815347 - November 14, 2023
Systems and methods are provided which utilize optical microcavity probes to map wafer topography by near-field interactions therebetween in a…
INSPECTION OF RETICLES USING MACHINE LEARNING
Application Number 20220084179 - March 17, 2022
Disclosed are methods and apparatus for inspecting a photolithographic reticle. A plurality of reference far field images are simulated by…
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
Application Number 20200333262 - October 22, 2020
Disclosed is apparatus for inspecting a sample. The apparatus includes illumination optics for simultaneously directing a plurality of…
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIFICATION
Application Number 20200292468 - September 17, 2020
Disclosed are apparatus and methods for inspecting a sample. Locations corresponding to candidate defect events on a sample are provided from…
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNING SENSITIVIES OF, AND DETERMINING A PROCESS WINDOW FOR, A MODULATED WAFER
Application Number 20200258792 - August 13, 2020
A system, method, and non-transitory computer readable medium are provided for tuning sensitivities of, and determining a process window for,…
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIFICATION
Application Number 20190383753 - December 19, 2019
Disclosed are apparatus and methods for inspecting a semiconductor sample. Locations corresponding to candidate defect events on a…
Franchi v. Orbotech Ltd. et al
Delaware District Court - June 4, 2018
Xitronix Corporation v. KLA-Tencor Corporation
Texas Western District Court - December 17, 2014
Plaintiff v. Defendant
California Central District Court - March 20, 2014
Plaintiff v. Defendant
California Central District Court - April 3, 2012
Nanometrics Incorporated v. KLA-Tencor Corporation
Delaware District Court - August 3, 2011
Xitronix Corporation v. KLA-Tencor Corporation
Texas Western District Court - June 25, 2015
MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)
Plaintiff v. Defendant
California Central District Court - April 10, 2015
MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…
KLA-Tencor Corporation v. Murphy et al
California Northern District Court - May 11, 2010
ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)
The New York City Employees' Retirement System et al v. Berry
California Northern District Court - January 29, 2010
STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…
The New York City Employees' Retirement System et al v. Berry
California Northern District Court - January 28, 2010
INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…
Travelers Property Casualty Co. of America v. KLA-Tencor Corp.
California Court of Appeal - February 13, 2020
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
United States US Court of Appeals, Federal Circuit - May 23, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
United States US Court of Appeals, Federal Circuit - March 19, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]
United States US Court of Appeals, Federal Circuit - March 14, 2019
Xitronix Corporation v. KLA-Tencor Corporation
United States US Court of Appeals, Fifth Circuit - February 15, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - May 23, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - March 19, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]
US Court of Appeals for the Federal Circuit - March 14, 2019
Xitronix Corporation v. KLA-Tencor Corporation
US Court of Appeals for the Fifth Circuit - February 15, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - June 15, 2018
