Process monitoring of deep structures with X-ray scatterometry
Patent Number 11955391 - April 9, 2024
Methods and systems for estimating values of process parameters, structural parameters, or both, based on x-ray scatterometry measurements of…
Optical near-field metrology
Patent Number 11815347 - November 14, 2023
Systems and methods are provided which utilize optical microcavity probes to map wafer topography by near-field interactions therebetween in a…
Measurement of overlay error using device inspection system
Patent Number 11784097 - October 10, 2023
A method and system for measuring overlay in a semiconductor manufacturing process comprise capturing an image of a feature in an article at a…
Accelerated training of a machine learning based model for semiconductor applications
Patent Number 11580375 - February 14, 2023
Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for…
Measuring thin films on grating and bandgap on grating
Patent Number 11555689 - January 17, 2023
Methods and systems disclosed herein can measure thin film stacks, such as film on grating and bandgap on grating in semiconductors. For…
INSPECTION OF RETICLES USING MACHINE LEARNING
Application Number 20220084179 - March 17, 2022
Disclosed are methods and apparatus for inspecting a photolithographic reticle. A plurality of reference far field images are simulated by…
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
Application Number 20200333262 - October 22, 2020
Disclosed is apparatus for inspecting a sample. The apparatus includes illumination optics for simultaneously directing a plurality of…
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIFICATION
Application Number 20200292468 - September 17, 2020
Disclosed are apparatus and methods for inspecting a sample. Locations corresponding to candidate defect events on a sample are provided from…
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNING SENSITIVIES OF, AND DETERMINING A PROCESS WINDOW FOR, A MODULATED WAFER
Application Number 20200258792 - August 13, 2020
A system, method, and non-transitory computer readable medium are provided for tuning sensitivities of, and determining a process window for,…
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIFICATION
Application Number 20190383753 - December 19, 2019
Disclosed are apparatus and methods for inspecting a semiconductor sample. Locations corresponding to candidate defect events on a…
Franchi v. Orbotech Ltd. et al
Delaware District Court - June 4, 2018
Xitronix Corporation v. KLA-Tencor Corporation
Texas Western District Court - December 17, 2014
Plaintiff v. Defendant
California Central District Court - March 20, 2014
Plaintiff v. Defendant
California Central District Court - April 3, 2012
Nanometrics Incorporated v. KLA-Tencor Corporation
Delaware District Court - August 3, 2011
Xitronix Corporation v. KLA-Tencor Corporation
Texas Western District Court - June 25, 2015
MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)
Plaintiff v. Defendant
California Central District Court - April 10, 2015
MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…
KLA-Tencor Corporation v. Murphy et al
California Northern District Court - May 11, 2010
ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)
The New York City Employees' Retirement System et al v. Berry
California Northern District Court - January 29, 2010
STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…
The New York City Employees' Retirement System et al v. Berry
California Northern District Court - January 28, 2010
INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…
Travelers Property Casualty Co. of America v. KLA-Tencor Corp.
California Court of Appeal - February 13, 2020
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
United States US Court of Appeals, Federal Circuit - May 23, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
United States US Court of Appeals, Federal Circuit - March 19, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]
United States US Court of Appeals, Federal Circuit - March 14, 2019
Xitronix Corporation v. KLA-Tencor Corporation
United States US Court of Appeals, Fifth Circuit - February 15, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - May 23, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - March 19, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]
US Court of Appeals for the Federal Circuit - March 14, 2019
Xitronix Corporation v. KLA-Tencor Corporation
US Court of Appeals for the Fifth Circuit - February 15, 2019
XITRONIX CORPORATION v. KLA-TENCOR CORPORATION
US Court of Appeals for the Federal Circuit - June 15, 2018
