KLA-Tencor Profile

KLA-Tencor Patent Grants

System and method for reducing radiation-induced false counts in an inspection system

Patent Number 10241217 - March 26, 2019

An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation…

Method, system, and user interface for metrology target characterization

Patent Number 10242290 - March 26, 2019

Methods and systems are provided, which identify specified metrology target abnormalities using selected metrics and classify the identified…

Reduced Coulomb interactions in a multi-beam column

Patent Number 10242839 - March 26, 2019

Performance of a multi-electron-beam system can be improved by reducing Coulomb effects in the illumination path of a multi-beam inspection…

System and method for electrodeless plasma ignition in laser-sustained plasma light source

Patent Number 10244613 - March 26, 2019

An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one…

Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector

Patent Number 10234271 - March 19, 2019

A spectroscopic beam profile metrology system simultaneously detects measurement signals over a large wavelength range and a large range of…

KLA-Tencor Patent Applications

METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION

Application Number 20190003960 - January 3, 2019

Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample. The method includes…

METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION

Application Number 20180364177 - December 20, 2018

This system comprises an illumination optics subsystem for generating and directing an incident beam towards a defect on a surface of a wafer.…

APPARATUS AND METHODS FOR MEASURING PHASE AND AMPLITUDE OF LIGHT THROUGH A LAYER

Application Number 20180340886 - November 29, 2018

In one embodiment, disclosed are apparatus, methods, and targets for determining a phase shift of a photomask having a phase-shift target. An…

INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS

Application Number 20180238816 - August 23, 2018

Disclosed are methods and systems for inspecting photolithographic reticles. A first and second reticle that were fabricated with a same…

PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGNMENT BETWEEN TWO LAYERS

Application Number 20180100735 - April 12, 2018

A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or…

KLA-Tencor Federal District Court Decisions

Xitronix Corporation v. KLA-Tencor Corporation

Texas Western District Court - June 25, 2015

MEMORANDUM OPINION AND ORDER DENYING Defendant's 5 MOTION to Dismiss Plaintiff's Complaint. Signed by Judge Sam Sparks. (klw)

Plaintiff v. Defendant

California Central District Court - April 10, 2015

MINUTES (IN CHAMBERS): ORDER GRANTING EMPLOYER AND PLAN DEFENDANTS' OMNIBUS MOTION TO DISMISS PLAINTIFFS' AMENDED COMPLAINT UNDER…

KLA-Tencor Corporation v. Murphy et al

California Northern District Court - May 11, 2010

ORDER by Judge Whyte denying 51 Motion for Partial Summary Judgment (rmwlc2, COURT STAFF) (Filed on 5/11/2010)

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 29, 2010

STIPULATION AND ORDER RE HEARING ON MOTIONS TO COMPEL PRODUCTION FROM NON-PARTY KLA-TENCOR AND DEFENDANT LISA C. BERRY. Signed by Judge…

The New York City Employees' Retirement System et al v. Berry

California Northern District Court - January 28, 2010

INTERIM ORDER CONTINUING HEARING ON LEAD PLAINTIFF'S MOTION FOR SANCTIONS AGAINST DEFENDANT ERNST & YOUNG, AND SOLICITING ADDITIONAL…

KLA-Tencor State Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - March 19, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]

United States US Court of Appeals, Federal Circuit - March 14, 2019

Xitronix Corporation v. KLA-Tencor Corporation

United States US Court of Appeals, Fifth Circuit - February 15, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

United States US Court of Appeals, Federal Circuit - June 15, 2018

Xitronix Corp. v. KLA-Tencor Corp.

United States US Court of Appeals, Federal Circuit - February 9, 2018

KLA-Tencor Federal Appellate Court Decisions

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - March 19, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION [ORDER - NONPRECEDENTIAL]

US Court of Appeals for the Federal Circuit - March 14, 2019

Xitronix Corporation v. KLA-Tencor Corporation

US Court of Appeals for the Fifth Circuit - February 15, 2019

XITRONIX CORPORATION v. KLA-TENCOR CORPORATION

US Court of Appeals for the Federal Circuit - June 15, 2018

Xitronix Corp. v. KLA-Tencor Corp.

US Court of Appeals for the Federal Circuit - February 9, 2018