Workpiece processing apparatus with plasma and thermal processing systems
Patent Number 11955315 - April 9, 2024
A processing apparatus for processing a workpiece is presented. The processing apparatus includes a processing chamber, a plasma chamber…
Transmission-based temperature measurement of a workpiece in a thermal processing system
Patent Number 11955388 - April 9, 2024
A thermal processing system for performing thermal processing can include a workpiece support plate configured to support a workpiece and heat…
Systems and methods for workpiece processing
Patent Number 11923215 - March 5, 2024
A processing system for processing a plurality of workpieces includes a transfer chamber in process flow communication with a first processing…
Enhanced ignition in inductively coupled plasmas for workpiece processing
Patent Number 11848204 - December 19, 2023
Plasma processing apparatus and associated methods are provided. In one example, a plasma processing apparatus includes a plasma chamber. The…
Workpiece processing apparatus with plasma and thermal processing systems
Patent Number 11837447 - December 5, 2023
An apparatus for combining plasma processing and thermal processing of a workpiece is presented. The apparatus includes a processing chamber,…
System and Method for Protection of Vacuum Seals in Plasma Processing Systems
Application Number 20160013025 - January 14, 2016
Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber…
APPARATUS AND METHODS FOR GENERATING ELECTROMAGNETIC RADIATION
Application Number 20150035436 - February 5, 2015
An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of…
Heating Configuration for Use in Thermal Processing Chambers
Application Number 20140246422 - September 4, 2014
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear…
LOW COST HIGH THROUGHPUT PROCESSING PLATFORM
Application Number 20140151195 - June 5, 2014
As part of a system for processing workpieces, a workpiece support arrangement, separate from a process chamber arrangement supports at least…
METHODS, APPARATUS AND MEDIA FOR DETERMINING A SHAPE OF AN IRRADIANCE PULSE TO WHICH A WORKPIECE IS TO BE EXPOSED
Application Number 20130306871 - November 21, 2013
A method and system for determining a shape of an irradiance pulse to which a semiconductor wafer is to be exposed during a thermal cycle are…
Mattson Technology, Inc. v. Applied Materials, Inc. et al
California Northern District Court - November 22, 2023
Plaintiff v. Defendant
Texas Western District Court - September 2, 2016
Plaintiff v. Defendant
Texas Western District Court - August 30, 2016
Talbert v. Mattson Technology, Inc. et al
California Northern District Court - February 18, 2016
Plaintiff v. Defendant
Texas Western District Court - April 2, 2009
Mattson Technology, Inc. v. Applied Materials, Inc.
California Court of Appeal - November 20, 2023
Mattson Technology, Inc. v. Applied Materials, Inc.
California Court of Appeal - November 1, 2023
