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Nanometrics Patent Grants

Optical metrology using differential fitting

Patent Number 9995689 - June 12, 2018

Parameters of a sample are measured using a model-based approach that utilizes the difference between experimental spectra acquired from the…

Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device

Patent Number 9958327 - May 1, 2018

The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a…

Protected lens cover plate for an optical metrology device

Patent Number 9958673 - May 1, 2018

A cover plate or lens for an optical metrology device that is positioned under a wafer during measurement is protected with a purge device.…

Focusing system with filter for open or closed loop control

Patent Number 9903806 - February 27, 2018

An optical metrology device, such as an ellipsometer, includes a focusing system that adjusts the focal position of the metrology device in…

Optical metrology system for spectral imaging of a sample

Patent Number 9846122 - December 19, 2017

An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and…

Nanometrics Patent Applications

FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL

Application Number 20150168290 - June 18, 2015

An optical metrology device, such as an ellipsometer, includes a focusing system that adjusts the focal position of the metrology device in…

OPTICAL METROLOGY WITH MULTIPLE ANGLES OF INCIDENCE AND/OR AZUMITH ANGLES

Application Number 20150153165 - June 4, 2015

An optical metrology device simultaneously detects light with multiple angles of incidence (AOI) and/or multiple azimuth angles to determine…

OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

Application Number 20150146193 - May 28, 2015

An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and…

ELLIPSOMETER FOCUSING SYSTEM

Application Number 20140098369 - April 10, 2014

An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam…

DARK FIELD DIFFRACTION BASED OVERLAY

Application Number 20130278942 - October 24, 2013

A dark field diffraction based overlay metrology device illuminates an overlay target that has at least three pads for an axis, the three pads…

Nanometrics Federal District Court Decisions

Nanometrics Incorporated v. Nova Measuring Instruments Ltd. et al

California Northern District Court - October 24, 2006

SUPPLEMENTAL ORDER TO ORDER SETTING INITIAL CASE MANAGEMENT CONFERENCE re 7 Clerks Notice. Signed by Judge William Alsup on 4/18/06. (dt,…