Nanometrics Profile

Nanometrics Patent Grants

Image based overlay measurement with finite gratings

Patent Number 10107621 - October 23, 2018

An image based overlay measurement is performed using an overlay target that includes shifted overlying gratings. The overlay target is imaged…

Optical metrology with purged reference chip

Patent Number 10082461 - September 25, 2018

An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a…

3D target for monitoring multiple patterning process

Patent Number 10061210 - August 28, 2018

A metrology target is designed for monitoring variations in a multiple patterning process, such as a self-aligned doubled patterning (SADP) or…

Optical metrology using differential fitting

Patent Number 9995689 - June 12, 2018

Parameters of a sample are measured using a model-based approach that utilizes the difference between experimental spectra acquired from the…

Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device

Patent Number 9958327 - May 1, 2018

The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a…

Nanometrics Patent Applications

FOCUSING SYSTEM WITH FILTER FOR OPEN OR CLOSED LOOP CONTROL

Application Number 20150168290 - June 18, 2015

An optical metrology device, such as an ellipsometer, includes a focusing system that adjusts the focal position of the metrology device in…

OPTICAL METROLOGY WITH MULTIPLE ANGLES OF INCIDENCE AND/OR AZUMITH ANGLES

Application Number 20150153165 - June 4, 2015

An optical metrology device simultaneously detects light with multiple angles of incidence (AOI) and/or multiple azimuth angles to determine…

OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE

Application Number 20150146193 - May 28, 2015

An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and…

ELLIPSOMETER FOCUSING SYSTEM

Application Number 20140098369 - April 10, 2014

An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam…

DARK FIELD DIFFRACTION BASED OVERLAY

Application Number 20130278942 - October 24, 2013

A dark field diffraction based overlay metrology device illuminates an overlay target that has at least three pads for an axis, the three pads…

Nanometrics Federal District Court Decisions

Nanometrics, Incorporated v. Optical Solutions, Inc.

California Northern District Court - March 5, 2019

ORDER GRANTING 43 MOTION TO DISMISS WITH LEAVE TO AMEND. Amended Complaint by OSI due 4/1/2019. Signed by Judge Beth Labson Freeman on…

Nanometrics Incorporated v. Nova Measuring Instruments Ltd. et al

California Northern District Court - October 24, 2006

SUPPLEMENTAL ORDER TO ORDER SETTING INITIAL CASE MANAGEMENT CONFERENCE re 7 Clerks Notice. Signed by Judge William Alsup on 4/18/06. (dt,…