ZFECT
Filed: July 10, 2018
Computer software for use in inspecting semiconductor wafers, substrates and lithographic masks including analysis of substrate and surface topography and defects
Serial Number: 88032561
Classification: Electrical and scientific apparatus
Status: New Application - Record Initialized Not Assigned To Examiner
Status Date: 2018-07-13
ZBEAM
Filed: July 10, 2018
Metrology apparatus for inspection of semiconductor wafers, substrates and lithographic masks including analysis of substrate and surface topology and defects
Serial Number: 88032556
Classification: Electrical and scientific apparatus
Status: New Application - Record Initialized Not Assigned To Examiner
Status Date: 2018-07-13
IMPERIA
Filed: September 4, 2014
Optical inspection apparatus for inspection of semiconductor wafers; optical metrology inspection system comprised of a light source, one or more cameras and sensors in communication with computer software and hardware
Serial Number: 86385876
Classification: Electrical and scientific apparatus
Status: New Application - Record Initialized Not Assigned To Examiner
Status Date: 2014-09-08
SENTINEL
Filed: August 5, 2013
Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate semiconductor wafers by ultra violet, infra-red and visible light, and thereby to acquire a spatial or spatial/spectral image of the band-edge luminescence emitted by the wafer using an imaging camera
Serial Number: 86028955
Classification: Electrical and scientific apparatus
Status: New Application - Record Initialized Not Assigned To Examiner
Status Date: 2013-08-08
TRAJECTORY
Filed: February 17, 2011
Optical metrology apparatus for measurement of semiconductor wafers; optical metrology apparatus for integration with other process equipment for the measurement of semiconductor wafers
Serial Number: 85244592
Registration Number: 4140065
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2012-05-08
VERTEX
Filed: February 17, 2011
Optical inspection apparatus for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing comprised of a control computer, software, automatic recipe controlled sample handling, monochromatic illumination sources, light sensors, cameras, optical filters, and monochrometers and spectrometers
Serial Number: 85244594
Classification: Electrical and scientific apparatus
Status: Abandoned - After Inter-Partes Decision
Status Date: 2013-02-20
UNIFIRE
Filed: February 17, 2011
Metrology system for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing comprised of an interferometric imaging microscope, an image processing and control computer, load ports for receiving wafers, automated axis drives for loading and positioning the wafer, and a clean air handling unit sold as a unit
Serial Number: 85244590
Registration Number: 4191474
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2012-08-14
SENTINEL PLI
Filed: June 30, 2009
Optical inspection system for silicon solar cell wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate solar cell wafers with infra-red and visible light and thereby to acquire a spatial image of the band-edge luminescence emitted by the wafer using an imaging camera
Serial Number: 77771084
Classification: Electrical and scientific apparatus
Status: Abandoned - No Statement Of Use Filed
Status Date: 2011-05-16
SENTINEL
Filed: June 30, 2009
Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras, optical filters, control computer, and monochromatic illumination source comprised of laser and LED light sensors, the foregoing used to illuminate semiconductor wafers by ultra violet, infra-red and visible light, and thereby to acquire a spatial or spatial/spectral image of the band-edge luminescence emitted by the wafer using an imaging camera
Serial Number: 77771069
Classification: Electrical and scientific apparatus
Status: Fifth Extension - Granted
Status Date: 2013-02-06
NANOLYNX
Filed: April 30, 2009
Apparatus for handling semiconductor wafers designed to support multiple metrology measuring device modules
Serial Number: 77726367
Classification: Electrical and scientific apparatus
Status: Abandoned - No Statement Of Use Filed
Status Date: 2011-12-05
CALIPER MOSAIC
Filed: April 10, 2009
Metrology system, namely, an automated wafer handling system comprised of axis drives for positioning the wafer, an optical imaging microscope, and an image processing and control computer, for the measurement of registration and overlay errors on semiconductor wafers and similar substrates in the manufacturing process
Serial Number: 77711584
Registration Number: 3804439
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2010-06-15
NANODIFFRACT
Filed: January 21, 2009
Optical Critical Dimension (OCD) computer software used for modeling and analysis of physical structures on semiconductor wafers and other substrates with microscopic features, contains a graphical user interface (GUI) which allows the user to model the structures in 2D and 3D, as well as perform sensitivity studies and other analytical functions, and contains at its core a powerful OCD engine for fast and reliable OCD modeling and analysis
Serial Number: 77653441
Registration Number: 3681748
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2009-09-08
LYNX
Filed: November 10, 2008
A fully automated, environmentally controlled, wafer handling system, primarily composed of a high-speed robot, control computer, clean air handling unit, and load ports for receiving wafers, designed to support multiple metrology modules for measurement of optical-critical dimensions, registration and overlay, and thin film thickness on wafers in the quality control aspect of the wafer manufacturing process
Serial Number: 76694146
Registration Number: 3987463
Classification: Machinery
Status: Registered
Status Date: 2011-07-05
NANOMETRICS
Filed: November 7, 2008
Scientific instruments used in the geophysical-geological fields, namely, seismological instruments, not including scientific instruments used in the field of metrology for measuring dimensions and thicknesses of deposited film or analyzing chemical compositions of materials or scientific instruments used for analyzing composite material in the form of ultra thin films, carbon nano tubes and nano and micro thick monolayers; Geophysical transducers, namely, electronic sensors for…
Serial Number: 77609519
Registration Number: 4169596
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2012-07-10
IMPULSE
Filed: March 3, 2008
Thin film, structure, and wafer surface measurement devices, namely, metrology and inspection tools that are designed to fit inside or be mounted onto and control production equipment and metrology equipment used in the manufacture of integrated circuits
Serial Number: 77411874
Registration Number: 3605146
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2009-04-14
NANOSTATION
Filed: November 14, 2007
Advanced multi-core computer system comprised of computer software and computer hardware for modeling complex grating structures used to measure critical dimensions of semiconductor and similar devices
Serial Number: 76684036
Registration Number: 3589489
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2009-03-17
CALIPER INSIGHT
Filed: October 25, 2007
Metrology system consisting of an automated wafer handling system consisting of an XY theta stage and vertical axis drive for positioning the wafer, an optical imaging microscope and an image processing and control computer for the measurement of registration and overlay errors on semiconductor waters and similar substrates
Serial Number: 76683287
Classification: Electrical and scientific apparatus
Status: Abandoned - After Publication
Status Date: 2009-04-13
LYNXWARE
Filed: August 3, 2007
Computer software for controlling the metrology measuring device modules that are attached to units that process semiconductor wafers
Serial Number: 76680269
Classification: Electrical and scientific apparatus
Status: Abandoned - No Statement Of Use Filed
Status Date: 2008-10-27
NANOLYNX
Filed: July 30, 2007
Apparatus for handling semi-conductor wafers designed to support multiple metrology measuring device modules
Serial Number: 76680167
Classification: Electrical and scientific apparatus
Status: Abandoned - No Statement Of Use Filed
Status Date: 2008-10-27
PREDICTIVE METRICS
Filed: December 26, 2006
Metrology products, namely, optical instruments, namely, ellipsometers, reflectometers, interferometers, scatterometers, comparitors, darkfield imagers, brightfield imagers, aerial imagers, diffraction imagers and photoluminescent imagers for optimizing manufacturing processes through the science of measurement
Serial Number: 76670761
Registration Number: 3373479
Classification: Electrical and scientific apparatus
Status: Registered
Status Date: 2008-01-22
