Ultratech Profile

Ultratech Patent Grants

Methods of forming an ALD-inhibiting layer using a self-assembled monolayer

Patent Number 10316406 - June 11, 2019

Methods of forming an ALD-inhibiting layer using a layer of SAM molecules include providing a metalized substrate having a metal M and an…

Scanning methods for focus control for lithographic processing of reconstituted wafers

Patent Number 10269662 - April 23, 2019

A method of processing a reconstituted wafer that supports IC chips includes operably disposing the reconstituted wafer in a lithography tool…

Method and apparatus for forming device quality gallium nitride layers on silicon substrates

Patent Number 10249491 - April 2, 2019

Atomic Layer Deposition (ALD) is used for heteroepitaxial film growth at reaction temperatures ranging from 80-400° C. The substrate and film…

Herbal composition for vaginal treatment

Patent Number 10201576 - February 12, 2019

The present invention discloses a herbal formulation comprising therapeutic effective amount of plant extract of Woodfordia Floribunda;…

Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations

Patent Number 10090153 - October 2, 2018

Method and devices are disclosed for device manufacture of gallium nitride devices by growing a gallium nitride layer on a silicon substrate…

Ultratech Patent Applications

Quartz crystal microbalance assembly for ALD systems

Application Number 20170260629 - September 14, 2017

A quartz crystal microbalance assembly includes a lid of a reactor chamber of an ALD system. A QCM crystal is disposed in a bottom section of…

PE-ALD METHODS WITH REDUCED QUARTZ-BASED CONTAMINATION

Application Number 20170241019 - August 24, 2017

Methods of performing PE-ALD on a substrate with reduced quartz-based contamination are disclosed. The methods include inductively forming in…

IMPROVED THROUGH SILICON VIA

Application Number 20170194204 - July 6, 2017

Through via holes are prepared for metallization using ALD and PEALD processing. Each via is coated with a titanium nitride barrier layer…

Full-wafer inspection methods having selectable pixel density

Application Number 20170178980 - June 22, 2017

Full-wafer inspection methods for a semiconductor wafer are disclosed. One method includes making a measurement of a select measurement…

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation

Application Number 20170162392 - June 8, 2017

High-efficiency line-forming optical systems and methods for defect annealing and dopant activation are disclosed. The system includes a…

Ultratech Federal District Court Decisions

De Letter et al v. Ultratech, Inc. et al

California Northern District Court - May 18, 2017

SUA SPONTE JUDICIAL REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP OF CASES Signed by Judge Alsup on 5/18/2017. (whalc1, COURT STAFF)…

Vladimir Gusinksky Rev. Trust v. Ultratech, Inc. et al

California Northern District Court - May 18, 2017

SUA SPONTE JUDICIAL REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP OF CASES re 3:17-cv-01542 Signed by Judge Alsup on 5/18/17. (whalc1,…

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - October 30, 2015

ORDER GRANTING EXTENSION by Hon. William Alsup granting 84 Stipulation.(whalc1, COURT STAFF) (Filed on 10/30/2015)

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - October 22, 2015

ORDER RE NOTICE OF SETTLEMENT [re 80 STIPULATION WITH PROPOSED ORDER Joint Notice of Settlement in Principle filed by Ensure NanoTech…

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California Northern District Court - September 15, 2015

ORDER RE EXTENSION OF CLAIM CONSTRUCTION BRIEFING AND INVALIDITY CONTENTIONS by Hon. William Alsup granting 80 Stipulation.(whalc1, COURT…

Ultratech State Court Decisions

Ultratech, Inc. v. Ensure Nanotech (Beijing) et al

California California Northern District Court - June 5, 2015

ORDER DENYING DEFENDANT DONGJUN WANGS MOTION TO DISMISS by Hon. William Alsup denying 44 Motion to Dismiss.(whalc1, COURT STAFF) (Filed on…