Method and Apparatus for Controlling Substrate DC-Bias and Ion Energy and Angular Distribution During Substrate Etching
Granted: March 19, 2015
Application Number:
20150076112
A variable capacitor is provided within a radiofrequency (RF) power transmission path to a bias electrode, in addition to an impedance matching circuit provided within the RF power transmission path to the bias electrode. An RF power supply is operated in a pulsed mode to transmit pulses of RF power through the RF power transmission path to the bias electrode. A capacitance of the variable capacitor is set to control a rate at which a DC bias voltage builds up on a substrate present…
Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorporating The Same
Granted: March 12, 2015
Application Number:
20150068613
A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber. The multi-line mass flow device comprises a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold comprises a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold comprises a multi-inlet mounting block, and two or more isolation valves mounted on the multi-inlet mounting…
System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor
Granted: March 5, 2015
Application Number:
20150064920
A plasma processing system and method includes a processing chamber, and a plasma processing volume included therein. The plasma processing volume having a volume less than the processing chamber. The plasma processing volume being defined by a top electrode, a substrate support surface opposing the surface of the top electrode and a plasma confinement structure including at least one outlet port. A conductance control structure is movably disposed proximate to the at least one outlet…
System, Method and Apparatus for Coordinating Pressure Pulses and RF Modulation in a Small Volume Confined Process Reactor
Granted: March 5, 2015
Application Number:
20150060404
A plasma processing system and method includes a processing chamber, and a plasma processing volume included therein. The plasma processing volume having a volume less than the processing chamber. The plasma processing volume being defined by a top electrode, a substrate support surface opposing the surface of the top electrode and a plasma confinement structure including at least one outlet port. A conductance control structure is movably disposed proximate to the at least one outlet…
HIGH-CONDUCTANCE, NON-SEALING THROTTLE VALVE WITH PROJECTIONS AND STOP SURFACES
Granted: March 5, 2015
Application Number:
20150059648
A throttle valve includes a throttle body including a housing having an inner surface. The throttle body includes first and second stop surfaces arranged on the inner surface. A throttle plate is rotatable inside the housing of the throttle body about a shaft between closed and open positions. A first projection is located on a first surface of the throttle plate adjacent to a radially outer end of the throttle plate. A second projection is located on a second surface of the throttle…
EXHAUST FLOW SPREADING BAFFLE-RISER TO OPTIMIZE REMOTE PLASMA WINDOW CLEAN
Granted: February 26, 2015
Application Number:
20150056108
Porogen accumulation in a UV-cure chamber may be reduced by removing outgassed porogen by flowing a purge gas across a window through which a wafer is exposed to UV light. Porogens in the purge gas stream may, as they flow through the chamber and into an exhaust baffle, deposit on surfaces within the chamber, including on the exhaust baffle. The exhaust baffle may have particular features that cause such porogen deposition to be more uniformly distributed across the exhaust baffle, thus…
BOTTOM-UP FILL IN DAMASCENE FEATURES
Granted: February 26, 2015
Application Number:
20150053565
The embodiments herein relate to methods and apparatus for filling features with copper by a bottom-up fill mechanism without the use of organic plating additives. In some cases, filling occurs directly on a semi-noble metal layer, without the deposition of a copper seed layer. In other cases, the filling occurs on a copper seed layer. Factors such as the polarization of electrolyte, the use of a complexing agent, electrolyte pH, electrolyte temperature, and the waveform used to deposit…
ADHESION LAYER FOR THROUGH SILICON VIA METALLIZATION
Granted: February 19, 2015
Application Number:
20150050808
To achieve the foregoing and in accordance with the purpose of the present invention, a method for forming copper filled through silicon via features in a silicon wafer is provided. Through silicon vias are etched in the wafer. An insulation layer is formed within the through silicon vias. A barrier layer is formed within the through silicon vias. An oxide free silicon, germanium, or SiGe adhesion layer is deposited over the barrier layer. A seed layer is deposited over the adhesion…
Plasma Processing Devices Having Multi-Port Valve Assemblies
Granted: February 19, 2015
Application Number:
20150047785
A plasma processing device may include a plasma processing chamber, a plasma electrode assembly, a wafer stage, a plasma producing gas inlet, a plurality of vacuum ports, at least one vacuum pump, and a multi-port valve assembly. The multi-port valve assembly may comprise a movable seal plate positioned in the plasma processing chamber. The movable seal plate may comprise a transverse port sealing surface that is shaped and sized to completely overlap the plurality of vacuum ports in a…
SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS AND METHOD OF FORMING THEREOF
Granted: February 12, 2015
Application Number:
20150044873
A method of forming a silicon containing confinement ring for a plasma processing apparatus useful for processing a semiconductor substrate comprises inserting silicon containing vanes into grooves formed in a grooved surface of an annular carbon template wherein the grooved surface of the annular carbon template includes an upwardly projecting step at an inner perimeter thereof wherein each groove extends from the inner perimeter to an outer perimeter of the grooved surface. The step of…
PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY
Granted: February 12, 2015
Application Number:
20150041062
An apparatus for plasma processing a wafer is provided. A bottom plate is provided. A tubular chamber wall with a wafer aperture is adjacent to the bottom plate. A bottom removable seal provides a vacuum seal between the bottom plate and the tubular chamber wall at a first end of the tubular wall. A top plate is adjacent to the tubular chamber wall. A top removable seal provides a vacuum seal between a second end of the tubular wall and the top plate. A vertical seal is provided, where a…
Method and Systems for Cleaning A Substrate
Granted: February 12, 2015
Application Number:
20150040947
An apparatus for cleaning a substrate is disclosed. The apparatus having a first head unit and a second head unit. The first head unit is positioned proximate to the surface of the substrate and has a first row of channels defined within configured to supply a foam to the surface of the substrate. The second head unit is positioned substantially adjacent to the first head unit and proximate to the surface of the substrate. A second and a third row of channels are defined within the…
Method and Apparatus for Cleaning A Semiconductor Substrate
Granted: February 12, 2015
Application Number:
20150040941
A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to…
DEDICATED VOICE/AUDIO PROCESSING THROUGH A GRAPHICS PROCESSING UNIT (GPU) OF A DATA PROCESSING DEVICE
Granted: February 5, 2015
Application Number:
20150035842
A method includes providing an input port and/or an output port directly interfaced with a Graphics Processing Unit (GPU) of a data processing device further including a Central Processing Unit (CPU) to enable a corresponding reception of input data and/or rendering of output data therethrough. The method also includes implementing a voice/audio processing engine in the data processing device. Further, the method includes performing voice/audio related processing of the input data…
CONFORMAL SIDEWALL PASSIVATION
Granted: February 5, 2015
Application Number:
20150037979
A method for etching features into an etch layer in a stack disposed below a patterned mask with mask features is provided. Coating providing molecules are provided. The coating providing molecules are pyrolyzed, which only produces a first set of byproducts and a second set of byproducts, wherein the first set of byproducts have a sticking coefficient between 10?6 to 5×10?3 and wherein the second set of byproducts includes all remaining byproducts from the pyrolysis wherein all…
METHOD FOR CAPTURING THE MOMENT OF THE PHOTO CAPTURE
Granted: February 5, 2015
Application Number:
20150039621
A method for storing digital images is presented. The method includes capturing an image using a digital camera system. It also comprises capturing metadata associated with the image or a moment of capture of the image. Further, it comprises storing the metadata in at least one field within a file format, wherein the file format defines a structure for the image, and wherein the at least one field is located within an extensible segment of the file format. In one embodiment, the metadata…
METHOD AND SYSTEM FOR APPLICATION EXECUTION BASED ON OBJECT RECOGNITION FOR MOBILE DEVICES
Granted: February 5, 2015
Application Number:
20150036875
Embodiments of the present invention enable mobile devices to behave as a dedicate remote control for different target devices through camera detection of a particular target device and autonomous execution of applications linked to the detected target device. Also, when identical target devices are detected, embodiments of the present invention may be configured to use visual identifiers and/or positional data associated with the target device for purposes of distinguishing the target…
REAL TIME NETWORK ADAPTIVE LOW LATENCY TRANSPORT STREAM MUXING OF AUDIO/VIDEO STREAMS FOR MIRACAST
Granted: February 5, 2015
Application Number:
20150036695
Systems and methods for multiplexing audio/video data and generating transport streams for WiFi network with reduced latency for real time playback at a remote device. A virtual presentation clock reference (PCR) representing a scheduled transmission time of a transport stream packet at a transport stream multiplexer is calculated based on the network transmission rate and generation of the data packets. The virtual PCR is compared with the corresponding system PCR to derive a time…
METHOD FOR SHARING ORIGINAL PHOTOS ALONG WITH FINAL PROCESSED IMAGE
Granted: February 5, 2015
Application Number:
20150036020
A method for storing digital images is presented. The method comprises accessing a first image. It further comprises capturing at least one second image. Further, it comprises storing metadata associated with the at least one second image in at least one field within a file format of the first image, wherein the file format defines a structure for the image, and wherein the at least one field is located within an extensible segment of the file format. In one embodiment, the at least one…
METHOD FOR SHARING DIGITAL PHOTOS SECURELY
Granted: February 5, 2015
Application Number:
20150035999
A method for sharing digital photos securely is presented. The method includes capturing image data using a digital camera system. It also includes encrypting the image data using an encryption key to produce encrypted image data. Further, it comprises storing metadata associated with the encrypting in at least one field within a file format, wherein the file format defines a structure for storing the encrypted image data, and wherein the at least one field is located within an…
