Lam Research Profile

Lam Research Patent Grants

Determining a malfunctioning device in a plasma system

Patent Number 10319570 - June 11, 2019

Systems and methods for determining a malfunctioning device in a plasma system, are described. One of the methods includes receiving an…

Methods and apparatus for depositing silicon oxide on metal layers

Patent Number 10319582 - June 11, 2019

Thin layer of silicon oxide is deposited on a substrate having an exposed layer of metal (e.g., W, Cu, Ti, Co, Ta) without causing substantial…

Apparatus and radiant heating plate for processing wafer-shaped articles

Patent Number 10312117 - June 4, 2019

An apparatus for processing wafer-shaped articles includes a rotary chuck adapted to hold a wafer-shaped article of a predetermined diameter…

Line charge volume with integrated pressure measurement

Patent Number 10312119 - June 4, 2019

A line charge volume and methods for use in delivery of gas to a reactor for processing semiconductor wafers is provided. The line charge…

Systems and methods for aligning measurement device in substrate processing systems

Patent Number 10312121 - June 4, 2019

A substrate support in a substrate processing system includes an inner portion arranged to support a substrate, an edge ring surrounding the…

Lam Research Patent Applications

Ferrite Cage RF Isolator For Power Circuitry

Application Number 20190164729 - May 30, 2019

RF isolation for power circuitry includes one or more ferrite cages surrounding a pair of coils, one coil connected to power input, and the…

SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY WITH ONE OR MORE HEATER LAYERS

Application Number 20190166700 - May 30, 2019

A substrate processing system includes a processing chamber, a pedestal arranged in the processing chamber, and an electrostatic chuck (ESC)…

SHOWERHEAD TILT MECHANISM

Application Number 20190153601 - May 23, 2019

A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing…

Multi-Zone Cooling Of Plasma Heated Window

Application Number 20190148118 - May 16, 2019

A substrate processing system includes a multi-zone cooling apparatus to provide cooling for all or substantially all of a window in a…

MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

Application Number 20190109008 - April 11, 2019

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…

Lam Research State Court Decisions

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - March 11, 2019

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - February 26, 2019

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 2/26/2019. (dlw)

Fujitsu Microelectronics v. Lam Research Corp.

Oregon Court of Appeals - June 6, 2001