Plasma-enhanced atomic layer deposition with radio-frequency power ramping
Patent Number 12270103 - April 8, 2025
Methods and apparatuses for depositing thin films using plasma-enhanced atomic layer deposition (PEALD) with ramping radio-frequency (RF)…
Method and apparatus for measuring particles
Patent Number 12270748 - April 8, 2025
An apparatus for measuring contamination on a critical surface of a part is provided. A vessel for mounting the part is provided. An inert gas…
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
Patent Number 12272570 - April 8, 2025
Several designs of a gas distribution device for a substrate processing system are provided. The gas distribution device includes a dual…
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
Patent Number 12272571 - April 8, 2025
Several designs of a gas distribution device for a substrate processing system are provided. The gas distribution device includes a dual…
Reduced footprint wafer handling platform
Patent Number 12272583 - April 8, 2025
A system comprises an equipment front end module (EFEM), a vacuum transfer module (VTM), a plurality off quad station process modules (QSMs).…
APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT
Application Number 20250118592 - April 10, 2025
Semiconductor processing tools with wafer back-side processing capabilities are disclosed. Such tools may be configured to only contact wafers…
DRY DEVELOPMENT OF RESISTS
Application Number 20250112045 - April 3, 2025
Dry development of resists can be useful, for example, to form a patterning mask in the context of high-resolution patterning. Dry development…
SENSORS FOR SEMICONDUCTOR PROCESSING TOOLS
Application Number 20250093216 - March 20, 2025
Described herein is a pedestal assembly comprising a platen and a sensor support plate below the platen. In at least one implementation,…
METHOD FOR PLASMA ETCHING A LAYER BASED ON A III-N MATERIAL
Application Number 20250079122 - March 6, 2025
A method for etching at least a portion of a layer based on a III-N material includes exposing a least one portion of an upper face of the…
DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-CONTAINING DEPOSITION INHIBITORS
Application Number 20250069948 - February 27, 2025
Metal films, such as molybdenum films are deposited on a semiconductor substrate having one or more recessed features in a deposition process…
In re: Lam Research Corp.
U.S. Court of Appeals, Federal Circuit - March 13, 2025
Lam Research Corp. v. Inpria Corp.
Michigan Eastern District Court - January 22, 2025
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Lam Research Corporation v. Cross et al
Texas Northern District Court - April 24, 2023
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
Lam Research Corporation v. Flamm
California Northern District Court - August 8, 2016
ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…
Lam Research Corporation v. Flamm
California Northern District Court - July 22, 2016
ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…
Lam Research Corporation v. Flamm
California Northern District Court - May 3, 2016
ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…
Lam Research Corporation v. Flamm
California Northern District Court - April 27, 2016
ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)
Turner et al v. Lam Research Corporation
Delaware Delaware District Court - November 13, 2024
MEMORANDUM OPINION. Signed by Judge Christopher J. Burke on 11/13/2024. (smg)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
CIGNEX Datamatics Inc v. LAM Research Corp
United States US Court of Appeals, Third Circuit - September 27, 2021
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - April 29, 2020
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 4/29/2020. (dlw)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - March 11, 2019
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)
CIGNEX Datamatics Inc v. LAM Research Corp
US Court of Appeals for the Third Circuit - September 27, 2021
