Lam Research Profile

Lam Research Patent Grants

Negative ion control for dielectric etch

Patent Number 10181412 - January 15, 2019

Apparatus, methods, and computer programs for semiconductor processing in a capacitively-coupled plasma chamber are provided. A chamber…

Ammonia radical generator

Patent Number 10173193 - January 8, 2019

An apparatus includes a base having first and second inlets. Inner and outer cylinders are disposed on the base, with the outer cylinder being…

Selective deposition of silicon oxide

Patent Number 10176984 - January 8, 2019

Methods and apparatuses for selectively depositing silicon oxide on a silicon oxide surface relative to a silicon nitride surface are…

Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level

Patent Number 10177003 - January 8, 2019

A substrate is disposed on a substrate holder within a process module. The substrate includes a mask material overlying a target material with…

High temperature substrate pedestal module and components thereof

Patent Number 10177024 - January 8, 2019

A semiconductor substrate processing apparatus comprises a vacuum chamber in which a semiconductor substrate may be processed, a showerhead…

Lam Research Patent Applications

SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

Application Number 20180350610 - December 6, 2018

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

Application Number 20180350649 - December 6, 2018

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

WIDE LIPSEAL FOR ELECTROPLATING

Application Number 20180251907 - September 6, 2018

A lipseal is designed for use in a lipseal assembly of an electroplating apparatus wherein a clamshell engages and supplies electrical current…

COBALT ETCH BACK

Application Number 20180102236 - April 12, 2018

Methods of etching cobalt on substrates are provided. Some methods involve exposing the substrate to a boron-containing halide gas and an…

METHOD FOR DEPOSITING ALD FILMS USING HALIDE-BASED PRECURSORS

Application Number 20180102245 - April 12, 2018

A method of depositing ALD films on semiconductor substrates processed in a micro-volume of a plasma enhanced atomic layer deposition (PEALD)…

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…