Lam Research Profile

Lam Research Patent Grants

Baffle for substrate processing system

Patent Number D1073758 - May 6, 2025

Throughput improvement with interval conditioning purging

Patent Number 12291777 - May 6, 2025

Processing methods and apparatus for increasing a reaction chamber batch size. Such a method of processing deposition substrates (e.g.,…

Alternating etch and passivation process

Patent Number 12293919 - May 6, 2025

Tin oxide films are used as spacers and hardmasks in semiconductor device manufacturing. In one method, tin oxide layer (e.g., spacer footing)…

Gold through silicon mask plating

Patent Number 12293943 - May 6, 2025

Systems and methods are provided for method for etch assisted gold (Au) through silicon mask plating (EAG-TSM). An example method comprises…

Modifying hydrophobicity of a wafer surface using an organosilicon precursor

Patent Number 12288685 - April 29, 2025

Methods and apparatuses for modifying a wafer surface using an organosilicon precursor are provided herein. The wafer surface is dosed with…

Lam Research Patent Applications

APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT

Application Number 20250118592 - April 10, 2025

Semiconductor processing tools with wafer back-side processing capabilities are disclosed. Such tools may be configured to only contact wafers…

DRY DEVELOPMENT OF RESISTS

Application Number 20250112045 - April 3, 2025

Dry development of resists can be useful, for example, to form a patterning mask in the context of high-resolution patterning. Dry development…

SENSORS FOR SEMICONDUCTOR PROCESSING TOOLS

Application Number 20250093216 - March 20, 2025

Described herein is a pedestal assembly comprising a platen and a sensor support plate below the platen. In at least one implementation,…

METHOD FOR PLASMA ETCHING A LAYER BASED ON A III-N MATERIAL

Application Number 20250079122 - March 6, 2025

A method for etching at least a portion of a layer based on a III-N material includes exposing a least one portion of an upper face of the…

DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-CONTAINING DEPOSITION INHIBITORS

Application Number 20250069948 - February 27, 2025

Metal films, such as molybdenum films are deposited on a semiconductor substrate having one or more recessed features in a deposition process…

Lam Research Federal Litigation Filings

In re: Lam Research Corp.

U.S. Court of Appeals, Federal Circuit - March 13, 2025

Lam Research Corp. v. Inpria Corp.

Michigan Eastern District Court - January 22, 2025

Rumph v. Lam Research Corporation et al

Oregon District Court - April 11, 2024

Rumph v. Lam Research Corporation et al

Oregon District Court - April 11, 2024

Lam Research Corporation v. Cross et al

Texas Northern District Court - April 24, 2023

Lam Research Federal District Court Decisions

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - September 29, 2022

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research State Court Decisions

Turner et al v. Lam Research Corporation

Delaware Delaware District Court - November 13, 2024

MEMORANDUM OPINION. Signed by Judge Christopher J. Burke on 11/13/2024. (smg)

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - September 29, 2022

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)

CIGNEX Datamatics Inc v. LAM Research Corp

United States US Court of Appeals, Third Circuit - September 27, 2021

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - April 29, 2020

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 4/29/2020. (dlw)

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - March 11, 2019

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)

Lam Research Federal Appellate Court Decisions

CIGNEX Datamatics Inc v. LAM Research Corp

US Court of Appeals for the Third Circuit - September 27, 2021