Lam Research Profile

Lam Research Patent Grants

Dynamic modulation of cross flow manifold during electroplating

Patent Number 10233556 - March 19, 2019

The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material…

Substrate supports with multi-layer structure including independent operated heater zones

Patent Number 10236193 - March 19, 2019

A substrate support is provided, is configured to support a substrate in a plasma processing chamber, and includes first, second and third…

Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide

Patent Number 10229826 - March 12, 2019

A method for depositing a metal layer on a barrier layer includes a) arranging a substrate in a processing chamber. The substrate has been…

Control of directionality in atomic layer etching

Patent Number 10229837 - March 12, 2019

A method for performing atomic layer etching (ALE) on a substrate is provided, including the following operations: performing a surface…

State-based adjustment of power and frequency

Patent Number 10231321 - March 12, 2019

Systems and methods for state-based adjustment of power and frequency are described. A primary generator of a system includes a primary power…

Lam Research Patent Applications

MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE

Application Number 20190032211 - January 31, 2019

A monolithic ceramic gas distribution plate for use in a process chamber wherein semiconductor substrates can be processed includes a…

SHOWERHEAD TILT MECHANISM

Application Number 20190032214 - January 31, 2019

A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing…

ELECTRO-OXIDATIVE METAL REMOVAL IN THROUGH MASK INTERCONNECT FABRICATION

Application Number 20190035640 - January 31, 2019

In one implementation a wafer processing method includes filling a plurality of through-resist recessed features with a metal, such that a…

SUBSTRATE PEDESTAL MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY

Application Number 20180350610 - December 6, 2018

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

Application Number 20180350649 - December 6, 2018

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…

Lam Research State Court Decisions

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - March 11, 2019

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware Delaware District Court - February 26, 2019

MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 2/26/2019. (dlw)

Fujitsu Microelectronics v. Lam Research Corp.

Oregon Court of Appeals - June 6, 2001