Substrate processing systems including gas delivery system with reduced dead legs
Patent Number 11959172 - April 16, 2024
A gas delivery system includes a 2-port valve including a first valve located between a first port and a second port. A 4-port valve includes…
Fill on demand ampoule refill
Patent Number 11959175 - April 16, 2024
Methods and apparatus for use of a fill on demand ampoule are disclosed. The fill on demand ampoule may refill an ampoule with precursor…
Flow metrology calibration for improved processing chamber matching in substrate processing systems
Patent Number 11959793 - April 16, 2024
A method for calibrating a gas flow metrology system for a substrate processing system includes a) measuring temperature using a first…
Pad raising mechanism in wafer positioning pedestal for semiconductor processing
Patent Number 11955366 - April 9, 2024
An assembly used in a process chamber for depositing a film on a wafer. A pedestal assembly includes a pedestal movably mounted to a main…
Spatially tunable deposition to compensate within wafer differential bow
Patent Number 11946142 - April 2, 2024
A plasma processing chamber for depositing a film on an underside surface of a wafer, includes showerhead pedestal. The showerhead pedestal…
MATCHING PRE-PROCESSING AND POST-PROCESSING SUBSTRATE SAMPLES
Application Number 20240112961 - April 4, 2024
Various embodiments herein relate to systems, methods, and media for matching pre-processing and post-processing substrate samples. In some…
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
Application Number 20230326790 - October 12, 2023
Methods of filling features including metal and dielectric surfaces with conductive materials involve cleaning the metal surfaces with little…
UV CURE FOR LOCAL STRESS MODULATION
Application Number 20230038611 - February 9, 2023
Localized stresses can be modulated in a film deposited on a bowed semiconductor substrate by selectively and locally curing the film by…
UV CURE FOR LOCAL STRESS MODULATION
Application Number 20230038611 - February 9, 2023
Localized stresses can be modulated in a film deposited on a bowed semiconductor substrate by selectively and locally curing the film by…
POST APPLICATION/EXPOSURE TREATMENTS TO IMPROVE DRY DEVELOPMENT PERFORMANCE OF METAL-CONTAINING EUV RESIST
Application Number 20230031955 - February 2, 2023
Various embodiments described herein relate to methods, apparatus, and systems for treating metal-containing photoresist to modify material…
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Lam Research Corporation v. Cross et al
Texas Northern District Court - April 24, 2023
Turner et al v. Lam Research Corporation
Delaware District Court - April 20, 2023
Turner et al v. Lam Research Corporation
Texas Western District Court - November 23, 2022
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
Lam Research Corporation v. Flamm
California Northern District Court - August 8, 2016
ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…
Lam Research Corporation v. Flamm
California Northern District Court - July 22, 2016
ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…
Lam Research Corporation v. Flamm
California Northern District Court - May 3, 2016
ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…
Lam Research Corporation v. Flamm
California Northern District Court - April 27, 2016
ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
CIGNEX Datamatics Inc v. LAM Research Corp
United States US Court of Appeals, Third Circuit - September 27, 2021
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - April 29, 2020
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 4/29/2020. (dlw)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - March 11, 2019
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - February 26, 2019
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 2/26/2019. (dlw)
CIGNEX Datamatics Inc v. LAM Research Corp
US Court of Appeals for the Third Circuit - September 27, 2021
