Concentration control using a bubbler
Patent Number 12209310 - January 28, 2025
The present disclosure relates, in part, to an apparatus for controlling the concentration of a component within a gas mixture. In particular…
Temperature control of a multi-zone pedestal
Patent Number 12209312 - January 28, 2025
A system to process a semiconductor substrate includes a substrate support assembly configured to support the semiconductor substrate. The…
Joining techniques for composite ceramic bodies
Patent Number 12211685 - January 28, 2025
In joining composite ceramic bodies, at least one ceramic body is a compositionally graded with varying concentrations between two or more…
Dry development of resists
Patent Number 12211691 - January 28, 2025
Dry development of resists can be useful, for example, to form a patterning mask in the context of high-resolution patterning. Dry development…
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
Patent Number 12211709 - January 28, 2025
Several designs of a gas distribution device for a substrate processing system are provided. The gas distribution device includes a dual…
METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVERY HEATER
Application Number 20250003065 - January 2, 2025
A gas delivery apparatus having a heating block assembly, a heating element, a gas line, and a temperature-sensing switch. The heating block…
VALVE MANIFOLD FOR SEMICONDUCTOR PROCESSING
Application Number 20240420969 - December 19, 2024
A valve manifold for use in a semiconductor processing tool comprises a manifold body, a purge gas inlet, a process gas inlet, a manifold…
AUTO BIT CHECK FOR PNEUMATIC VALVE VERIFICATION
Application Number 20240360921 - October 31, 2024
An auto bit check feature for pneumatic valve verification as coupled with a gas line that may be coupled with a semiconductor device process…
MATCHING PRE-PROCESSING AND POST-PROCESSING SUBSTRATE SAMPLES
Application Number 20240112961 - April 4, 2024
Various embodiments herein relate to systems, methods, and media for matching pre-processing and post-processing substrate samples. In some…
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
Application Number 20230326790 - October 12, 2023
Methods of filling features including metal and dielectric surfaces with conductive materials involve cleaning the metal surfaces with little…
Lam Research Corp. v. Inpria Corp.
Michigan Eastern District Court - January 22, 2025
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Lam Research Corporation v. Cross et al
Texas Northern District Court - April 24, 2023
Turner et al v. Lam Research Corporation
Delaware District Court - April 20, 2023
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
Lam Research Corporation v. Flamm
California Northern District Court - August 8, 2016
ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…
Lam Research Corporation v. Flamm
California Northern District Court - July 22, 2016
ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…
Lam Research Corporation v. Flamm
California Northern District Court - May 3, 2016
ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…
Lam Research Corporation v. Flamm
California Northern District Court - April 27, 2016
ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)
Turner et al v. Lam Research Corporation
Delaware Delaware District Court - November 13, 2024
MEMORANDUM OPINION. Signed by Judge Christopher J. Burke on 11/13/2024. (smg)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
CIGNEX Datamatics Inc v. LAM Research Corp
United States US Court of Appeals, Third Circuit - September 27, 2021
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - April 29, 2020
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 4/29/2020. (dlw)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - March 11, 2019
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)
CIGNEX Datamatics Inc v. LAM Research Corp
US Court of Appeals for the Third Circuit - September 27, 2021
