Lam Research Profile

Lam Research Patent Grants

Methods and apparatuses for electroplating and seed layer detection

Patent Number 9822460 - November 21, 2017

Disclosed herein are methods and apparatuses for electroplating which employ seed layer detection. Such methods and related apparatuses may…

Plasma stabilization method and plasma apparatus

Patent Number 9824863 - November 21, 2017

A plasma technique in which a plasma generation technique frequently used in various fields including a semiconductor manufacturing process is…

Waferless clean in dielectric etch process

Patent Number 9824865 - November 21, 2017

A system and method for a waferless cleaning method for a capacitive coupled plasma system. The method includes forming a protective layer on…

Method for depositing metals free ald silicon nitride films using halide-based precursors

Patent Number 9824884 - November 21, 2017

A method of depositing silicon nitride films on semiconductor substrates processed in a micro-volume of a plasma enhanced atomic layer…

Tin oxide thin film spacers in semiconductor device manufacturing

Patent Number 9824893 - November 21, 2017

Thin tin oxide films are used as spacers in semiconductor device manufacturing. In one implementation, thin tin oxide film is conformally…

Lam Research Patent Applications

METHODS AND APPARATUSES FOR CONTROLLING TRANSITIONS BETWEEN CONTINUOUS WAVE AND PULSING PLASMAS

Application Number 20170330764 - November 16, 2017

Provided are methods and apparatuses for smoothly transitioning from a first plasma condition to a second plasma condition in a plasma…

SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING

Application Number 20170321324 - November 9, 2017

A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be…

Detection System for Tunable/Replaceable Edge Coupling Ring

Application Number 20170263478 - September 14, 2017

A substrate processing system includes a processing chamber. A pedestal is arranged in the processing chamber. An edge coupling ring is…

ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE REACTOR

Application Number 20170213747 - July 27, 2017

The disclosed techniques relate to methods and apparatus for etching a substrate. A plate assembly divides a reaction chamber into a lower and…

ACTUATOR TO DYNAMICALLY ADJUST SHOWERHEAD TILT IN A SEMICONDUCTOR PROCESSING APPARATUS

Application Number 20170191160 - July 6, 2017

A showerhead module adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing…

Lam Research Federal Litigation Filings

CIGNEX Datamatics, Inc. v. Lam Research Corporation

Delaware District Court - March 24, 2017

Lam Research Corporation v. Flamm

California Northern District Court - March 18, 2015

B-M et al v. LAM Research Corporation

California Eastern District Court - October 15, 2013

Tessitore v. Novellus Systems, Inc. et al

California Northern District Court - February 17, 2012

Nagpal v. Hill et al

California Northern District Court - January 6, 2012

Lam Research Federal District Court Decisions

Lam Research Corporation v. Flamm

California Northern District Court - August 8, 2016

ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…

Lam Research Corporation v. Flamm

California Northern District Court - July 22, 2016

ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…

Lam Research Corporation v. Flamm

California Northern District Court - May 3, 2016

ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…

Lam Research Corporation v. Flamm

California Northern District Court - April 27, 2016

ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)

Lam Research Corporation v. Flamm

California Northern District Court - March 30, 2016

ORDER SUA SPONTE SEVERING DEFENDANT AND THIRD-PARTY PLAINTIFF DANIEL L. FLAMMS CLAIMS AGAINST THIRD-PARTY DEFENDANTS. Signed by Judge Beth…