Lipseal edge exclusion engineering to maintain material integrity at wafer edge
Patent Number 12247310 - March 11, 2025
Sequential electrodeposition of metals into through-mask features on a semiconductor substrate is conducted such as to reduce the deleterious…
Bubble defect reduction
Patent Number 12248252 - March 11, 2025
In some examples, a method of processing a substrate comprises applying a photoresist (PR) onto a surface of the substrate, pre-exposing the…
Single crystal metal oxide plasma chamber component
Patent Number 12249490 - March 11, 2025
A component of a plasma processing chamber having at least one plasma facing surface of the component comprises single crystal metal oxide…
Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers
Patent Number 12249514 - March 11, 2025
Fabricating a semiconductor substrate by (a) vertical etching a feature having sidewalls and a depth into one or more layers formed on the…
Wafer shielding for prevention of lipseal plate-out
Patent Number 12241173 - March 4, 2025
Undesired deposition of metals on a lipseal (lipseal plate-out) during electrodeposition of metals on semiconductor substrates is minimized or…
METHOD FOR PLASMA ETCHING A LAYER BASED ON A III-N MATERIAL
Application Number 20250079122 - March 6, 2025
A method for etching at least a portion of a layer based on a III-N material includes exposing a least one portion of an upper face of the…
DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-CONTAINING DEPOSITION INHIBITORS
Application Number 20250069948 - February 27, 2025
Metal films, such as molybdenum films are deposited on a semiconductor substrate having one or more recessed features in a deposition process…
MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER
Application Number 20250051921 - February 13, 2025
A gas conditioning apparatus comprising a substrate block comprising one or more fluid ports on an upper surface of the substrate block. The…
A WAFER CHUCK ASSEMBLY WITH THERMAL INSULATION FOR RF CONNECTIONS
Application Number 20250054736 - February 13, 2025
Described is a wafer chuck assembly comprising a platen with one or more plasma electrodes, and a radio frequency (RF) assembly comprising at…
METHOD FOR REDUCING VARIATIONS IN MASK TOPOGRAPHY
Application Number 20250054769 - February 13, 2025
A patterning method includes etching a mask formed above a stack of two or more layers where the mask comprises a first patterned structure, a…
Lam Research Corp. v. Inpria Corp.
Michigan Eastern District Court - January 22, 2025
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Rumph v. Lam Research Corporation et al
Oregon District Court - April 11, 2024
Lam Research Corporation v. Cross et al
Texas Northern District Court - April 24, 2023
Turner et al v. Lam Research Corporation
Delaware District Court - April 20, 2023
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
Lam Research Corporation v. Flamm
California Northern District Court - August 8, 2016
ORDER (1) CONDITIONALLY GRANTING 134 JOINT MOTION TO STAY PROCEEDINGS (2) DENYING WITHOUT PREJUDICE 64 MOTION TO DISMISS. Signed by Judge…
Lam Research Corporation v. Flamm
California Northern District Court - July 22, 2016
ORDER (1) VACATING HEARINGS ON MOTIONS TO DISMISS AND STAY, (2) CONTINUING CASE MANAGEMENT CONFERENCE TO NOVEMBER 3, 2016, AND (3) ORDER RE:…
Lam Research Corporation v. Flamm
California Northern District Court - May 3, 2016
ORDER SETTING CASE MANAGEMENT CONFERENCE FOR MAY 19, 2016. Signed by Judge Beth Labson Freeman on 5/3/2016. (blflc3S, COURT STAFF) (Filed on…
Lam Research Corporation v. Flamm
California Northern District Court - April 27, 2016
ORDER OF REFERRAL FOR PURPOSE OF DETERMINING RELATIONSHIP. Signed by Judge Richard Seeborg on 4/27/16. (cl, COURT STAFF) (Filed on 4/27/2016)
Turner et al v. Lam Research Corporation
Delaware Delaware District Court - November 13, 2024
MEMORANDUM OPINION. Signed by Judge Christopher J. Burke on 11/13/2024. (smg)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - September 29, 2022
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 9/29/2022. (mdb)
CIGNEX Datamatics Inc v. LAM Research Corp
United States US Court of Appeals, Third Circuit - September 27, 2021
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - April 29, 2020
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 4/29/2020. (dlw)
CIGNEX Datamatics, Inc. v. Lam Research Corporation
Delaware Delaware District Court - March 11, 2019
MEMORANDUM OPINION. Signed by Judge Maryellen Noreika on 3/11/2019. (dlw)
CIGNEX Datamatics Inc v. LAM Research Corp
US Court of Appeals for the Third Circuit - September 27, 2021
